JPS638899Y2 - - Google Patents

Info

Publication number
JPS638899Y2
JPS638899Y2 JP1984198781U JP19878184U JPS638899Y2 JP S638899 Y2 JPS638899 Y2 JP S638899Y2 JP 1984198781 U JP1984198781 U JP 1984198781U JP 19878184 U JP19878184 U JP 19878184U JP S638899 Y2 JPS638899 Y2 JP S638899Y2
Authority
JP
Japan
Prior art keywords
pellicle
mask
frame
air vent
vent hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984198781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61114445U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984198781U priority Critical patent/JPS638899Y2/ja
Publication of JPS61114445U publication Critical patent/JPS61114445U/ja
Application granted granted Critical
Publication of JPS638899Y2 publication Critical patent/JPS638899Y2/ja
Expired legal-status Critical Current

Links

JP1984198781U 1984-12-27 1984-12-27 Expired JPS638899Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984198781U JPS638899Y2 (cs) 1984-12-27 1984-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984198781U JPS638899Y2 (cs) 1984-12-27 1984-12-27

Publications (2)

Publication Number Publication Date
JPS61114445U JPS61114445U (cs) 1986-07-19
JPS638899Y2 true JPS638899Y2 (cs) 1988-03-16

Family

ID=30758093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984198781U Expired JPS638899Y2 (cs) 1984-12-27 1984-12-27

Country Status (1)

Country Link
JP (1) JPS638899Y2 (cs)

Also Published As

Publication number Publication date
JPS61114445U (cs) 1986-07-19

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