JPS6386495A - Wiring board - Google Patents

Wiring board

Info

Publication number
JPS6386495A
JPS6386495A JP22973386A JP22973386A JPS6386495A JP S6386495 A JPS6386495 A JP S6386495A JP 22973386 A JP22973386 A JP 22973386A JP 22973386 A JP22973386 A JP 22973386A JP S6386495 A JPS6386495 A JP S6386495A
Authority
JP
Japan
Prior art keywords
wiring
cross
wiring board
characteristic impedance
signal wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22973386A
Other languages
Japanese (ja)
Other versions
JPH0691324B2 (en
Inventor
須藤 俊夫
二川 悟
武史 宮城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22973386A priority Critical patent/JPH0691324B2/en
Publication of JPS6386495A publication Critical patent/JPS6386495A/en
Publication of JPH0691324B2 publication Critical patent/JPH0691324B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、半導体集積回路素子特に高速の論理素子を実
装する配線基板に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a wiring board on which semiconductor integrated circuit elements, particularly high-speed logic elements, are mounted.

(従来の技術) 近年、半導体集積回路素子の分野では、GaAs(カリ
ウム砒素)ICのような高速領域まで論理動作を行う高
速論理素子の開発が盛んである。このような高速論理素
子を実装基板上に複数個搭載し動作させると、素子間の
配線の伝搬遅延や配線容量が、全体の論理動作スピード
に大きな影響を与える。
(Prior Art) In recent years, in the field of semiconductor integrated circuit devices, there has been active development of high-speed logic devices such as GaAs (potassium arsenide) ICs that perform logic operations up to high-speed ranges. When a plurality of such high-speed logic elements are mounted on a mounting board and operated, the propagation delay and wiring capacitance of the wiring between the elements have a large effect on the overall logic operation speed.

通常の多層基板の配線構造としては、信号配線の特性イ
ンピーダンスを一定に保つために、信号配線の上、下面
を絶縁層を介して接地面あるいは、電源面等の導体面で
はさんだ第3図に示すようなストリップ線路といわれる
配線構造をとることが多い。
The wiring structure of a normal multilayer board is shown in Figure 3, in which the top and bottom surfaces of the signal wiring are sandwiched between a ground plane or a conductive surface such as a power supply plane via an insulating layer in order to keep the characteristic impedance of the signal wiring constant. A wiring structure called a strip line, as shown in the figure, is often used.

このような配線構造を有する配線基板において。In a wiring board having such a wiring structure.

配線容量を低減するための方法としては、1つの手法は
、信号配線41をとりかこむ絶縁層42に、低誘電率材
料を用いることである。例えば、アルミナセラミック材
(比誘電率t 、==9.s)やガラス・エポキシ材(
ε、=4.5)に対して、ポリイミド材(t P−3,
8)やテフロン材(i P=2.5)等を用いることで
ある。
One method for reducing the wiring capacitance is to use a low dielectric constant material for the insulating layer 42 surrounding the signal wiring 41. For example, alumina ceramic material (relative dielectric constant t ==9.s) and glass epoxy material (
ε, = 4.5), whereas polyimide material (t P-3,
8) or Teflon material (i P = 2.5).

もう1つの手法は、配線構造上の工夫で、信号配線を上
、下にはさむ接地面あるいは電源面の導体面を格子状の
ようにパターン化して形成し、信号の配線容量を低くす
ることである。第5図(a)は、このような配線基板を
上から見た透視図で。
Another method is to improve the wiring structure by patterning the conductor surface of the ground plane or power supply plane between the top and bottom of the signal wiring in a grid pattern, thereby lowering the signal wiring capacitance. be. FIG. 5(a) is a perspective view of such a wiring board seen from above.

信号配s51に対し一定の空間的周期を有する導体面5
3.54により絶縁層52を介してはさんだ構造で。
A conductor surface 5 having a constant spatial period with respect to the signal distribution s51
3.54, the structure is sandwiched with an insulating layer 52 in between.

上、下の導体面53 、54は同一のパターンで互いに
重なっている。
The upper and lower conductor surfaces 53 and 54 overlap each other in the same pattern.

しかしながら、接地面や電源面を格子状にパターン化し
た場合、信号配線が、格子状導体面を通過するときに、
その特性インピーダンスが格子のピッチに対応して周期
的に変動し格子のピッチが粗いほど、変動値が大きくな
るという問題が生じていた。即ち、第5図(a)中、信
号配線方向に対して断面A−A’ とB−B’のように
異なる位置関係の断面を第5図(b) (c)に示す、
断面A−A’での信号配置51と最近接導体面との配線
容量は図中CIA + C2Aである。これに対して断
面B−B’では信号配線51と最近接導体面との配線容
量は2 (CIB+Cza)となる、一般に、断面A−
A’ と断面B−B’での配線容量は異なり、特性イン
ピーダンスは格子パターンのピッチに対応して同期的に
変動する。
However, when the ground plane or power supply plane is patterned into a grid pattern, when the signal wiring passes through the grid conductor plane,
A problem has arisen in that the characteristic impedance periodically fluctuates in response to the pitch of the grating, and the rougher the pitch of the grating, the larger the fluctuation value. That is, in FIG. 5(a), cross sections with different positional relationships such as cross sections AA' and BB' with respect to the signal wiring direction are shown in FIGS. 5(b) and 5(c).
The wiring capacitance between the signal arrangement 51 and the nearest conductor surface on the cross section AA' is CIA + C2A in the figure. On the other hand, in the cross section B-B', the wiring capacitance between the signal wiring 51 and the nearest conductor surface is 2 (CIB+Cza).
The wiring capacitance at A' and the cross section B-B' are different, and the characteristic impedance varies synchronously in accordance with the pitch of the lattice pattern.

GaAs I Cのような高速論理素子は他の論理素子
、例えばTTLやECLに比べて、ノイズマージンが少
ないため、特性インピーダンスの変動による信号反射は
、全体の動作マージンの減少や論理誤動作を起こしたり
、波形歪みによる時間変動を生じるという開運があった
High-speed logic elements such as GaAs IC have a smaller noise margin than other logic elements, such as TTL and ECL, so signal reflection due to changes in characteristic impedance can reduce the overall operating margin and cause logic malfunctions. , we had the good fortune to experience time fluctuations due to waveform distortion.

(発明が解決しようとする問題点) このように以 配線容量を低減するためのパターン化さ
れた導体面を有する配線構造は、信号配線の特性インピ
ーダンスの変動を起こすという問題があった1本発明の
目的は、パターン化された導体面を用いながら、信号の
特性インピーダンスの変動をおさえた配線構造を有する
配線基板を提供することを目的とする。
(Problems to be Solved by the Invention) As described above, the wiring structure having a patterned conductor surface for reducing wiring capacitance has a problem in that the characteristic impedance of the signal wiring fluctuates. An object of the present invention is to provide a wiring board having a wiring structure that suppresses fluctuations in signal characteristic impedance while using a patterned conductor surface.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) 上記、目的を達成するために1本発明は信号配線を絶縁
層を介して、上下にはさむ導体面をパターン周期の半分
だけ、互いにずらして形成したことを特徴とするもので
ある。
(Means for Solving the Problems) In order to achieve the above-mentioned objects, one aspect of the present invention is that signal wiring is formed by interposing an insulating layer between upper and lower conductor surfaces, which are shifted from each other by half the pattern period. This is a characteristic feature.

(作用) 本発明のように上、不導体面のパターンを互いにパター
ン周期の半分だけずらすと信号の配線方向に対し、変動
のピッチが172になり、配線容量の分布が均一化する
ために、特性インピーダンスの変動量も減少する。
(Function) If the patterns on the upper and non-conductor surfaces are shifted from each other by half the pattern period as in the present invention, the pitch of variation becomes 172 in the signal wiring direction, and the distribution of wiring capacitance becomes uniform. The amount of variation in characteristic impedance is also reduced.

(実施例) 本発明を以下図を参照して詳細に述べる。第1図は1本
発明の一実施例を示した透視図である。
(Example) The present invention will be described in detail below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of the present invention.

信号配線11は、格子状にパターン化された上面の導体
面13と下面の導体面14で、絶縁層12を介してはさ
まれている。絶1JL2はポリイミド材等の有機樹脂材
料よりなる。信号配線11や、導体面13゜14は銅等
の電気伝導性の良い金属により形成される。上下の導体
面13.14は、同一の空間的くりかえし周期を有する
パターン、この例では格子状のパターンで形成される。
The signal wiring 11 is sandwiched between an upper conductor surface 13 and a lower conductor surface 14, which are patterned in a lattice shape, with an insulating layer 12 in between. The material 1JL2 is made of an organic resin material such as polyimide material. The signal wiring 11 and the conductive surfaces 13 and 14 are made of a metal with good electrical conductivity such as copper. The upper and lower conductor surfaces 13, 14 are formed in a pattern with the same spatial repeating period, in this example a grid-like pattern.

この時、下部導体面14の格子点Q1〜Q4は、上式導
体面の格子点P1〜P4の頂度中間点になるように、く
りかえし周期(図中Pで示す)の172だけずらして形
成する。本発明について信号配線方向に断面A−A’ 
とB−B’ を比較すると第1図(b) (c)のよう
b;なり、上部と下部の導体の位置関係が逆転するだけ
で、配線容量CIA+202AとC2B + 2C2B
は同一となる。従って、断面A−A’での特性インピー
ダンスと断面B−B’での特性インピーダンスでは同一
となり、特性インピーダンスの変動周期は1/2となる
。第2図は、第1図の断面位置に対して、特性インピー
ダンスの変動を示したものである。
At this time, the lattice points Q1 to Q4 on the lower conductor surface 14 are shifted by 172 of the repetition period (indicated by P in the figure) so that they are at the midpoint of the vertices of the lattice points P1 to P4 on the upper conductor surface. do. Regarding the present invention Cross section A-A' in the signal wiring direction
Comparing B-B' and B-B' results in b; as shown in Figure 1 (b) and (c), and just by reversing the positional relationship of the upper and lower conductors, the wiring capacitances are CIA + 202A and C2B + 2C2B.
are the same. Therefore, the characteristic impedance at the cross section AA' and the characteristic impedance at the cross section BB' are the same, and the period of variation of the characteristic impedance is 1/2. FIG. 2 shows the variation in characteristic impedance with respect to the cross-sectional position in FIG. 1.

本発明の場合(図中:Llで示す)、従来の場合(図中
:Llで示す)と比較すると断面位[A−A’とB−B
’での特性インピーダンスが等しくなり、また、その中
間点c−c’では同一断面構造となるためLlとLlは
c−c’で交わる。従って、変動の周期は実質的に1/
4となり変動分は大幅に改善される。
In the case of the present invention (indicated by Ll in the figure), compared to the conventional case (indicated by Ll in the figure), the cross-sectional positions [A-A' and B-B
Since the characteristic impedances at ' are equal and the cross-sectional structures are the same at the midpoint c-c', Ll and L1 intersect at c-c'. Therefore, the period of fluctuation is essentially 1/
4, which greatly improves the variation.

第3図は本発明を多層基板に適用した実施例を示したも
ので、信号配線31.31’は絶fa、1132を介し
て接地面あるいは電源面の導体面33,34.35で多
層にはさまれた構造を有している。この時、導体面33
,34.35は互いにパターン周期を1/2だけずらし
て形成したものである。36はICである。
FIG. 3 shows an embodiment in which the present invention is applied to a multilayer board, in which the signal wiring 31, 31' is connected to conductor planes 33, 34, 35 on the ground plane or power supply plane in multiple layers via absolute fa, 1132. It has a sandwiched structure. At this time, the conductor surface 33
, 34 and 35 are formed by shifting the pattern period by 1/2 from each other. 36 is an IC.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、配線容量を低減させる接地面や電源面
等の導体面をくりかえし周期を有するパターンを互いに
くりかえし周期の半分だけずらして形成するCCにより
特性インピーダンスの変動は小さくなる。
According to the present invention, variations in characteristic impedance are reduced by CC, which is formed by repeating patterns on conductor surfaces such as ground planes and power supply planes, which reduce wiring capacitance, and shifting patterns by a half of the period.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係わる配線基板の透視図、断面図、第
2図は本発明と従来例の特性インピーダンス2の変動を
比較した図、第3図は多層基板の実施例を示す図、第4
図はストリップ線路の断面構造を示す図、第5図は従来
の配線基板の透視図及び断面図である。 11.31,41.51・・・信号配線、12.32,
42.52・・・絶縁層。 13.14,33,34,53.54・・・接地面ある
いは電源面。 第  1 図 第  2 図 第  3 図 第  4 図 <21> 第  5v!J
FIG. 1 is a perspective view and a cross-sectional view of a wiring board according to the present invention, FIG. 2 is a diagram comparing variations in characteristic impedance 2 between the present invention and a conventional example, and FIG. 3 is a diagram showing an embodiment of a multilayer board. Fourth
The figure shows a cross-sectional structure of a strip line, and FIG. 5 is a perspective view and a cross-sectional view of a conventional wiring board. 11.31, 41.51... Signal wiring, 12.32,
42.52...Insulating layer. 13.14, 33, 34, 53.54... Ground plane or power supply plane. Figure 1 Figure 2 Figure 3 Figure 4 <21> 5th v! J

Claims (1)

【特許請求の範囲】[Claims]  信号配線を絶縁層を介して、上面及び下面を導体面で
はさむ構造を有する配線基板において、上面及び下面は
ほぼ同一の一定周期を有するパターン化された導体によ
り形成され、互いに周期の半分ずらして形成しているこ
とを特徴とする配線基板。
In a wiring board having a structure in which signal wiring is sandwiched between conductive surfaces on the upper and lower surfaces with an insulating layer interposed therebetween, the upper and lower surfaces are formed of patterned conductors having almost the same constant period, and are shifted by half the period from each other. A wiring board characterized in that:
JP22973386A 1986-09-30 1986-09-30 Wiring board Expired - Lifetime JPH0691324B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22973386A JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22973386A JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Publications (2)

Publication Number Publication Date
JPS6386495A true JPS6386495A (en) 1988-04-16
JPH0691324B2 JPH0691324B2 (en) 1994-11-14

Family

ID=16896835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22973386A Expired - Lifetime JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Country Status (1)

Country Link
JP (1) JPH0691324B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04127598A (en) * 1990-09-19 1992-04-28 Nec Corp Multilayer wiring board
JPH04132295A (en) * 1990-09-21 1992-05-06 Nec Corp Multilayer wiring board
JP2015231105A (en) * 2014-06-04 2015-12-21 三菱電機株式会社 Strip line
WO2022158356A1 (en) * 2021-01-21 2022-07-28 株式会社フジクラ Wiring board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04127598A (en) * 1990-09-19 1992-04-28 Nec Corp Multilayer wiring board
JPH04132295A (en) * 1990-09-21 1992-05-06 Nec Corp Multilayer wiring board
JP2015231105A (en) * 2014-06-04 2015-12-21 三菱電機株式会社 Strip line
WO2022158356A1 (en) * 2021-01-21 2022-07-28 株式会社フジクラ Wiring board

Also Published As

Publication number Publication date
JPH0691324B2 (en) 1994-11-14

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