JPH0691324B2 - Wiring board - Google Patents

Wiring board

Info

Publication number
JPH0691324B2
JPH0691324B2 JP22973386A JP22973386A JPH0691324B2 JP H0691324 B2 JPH0691324 B2 JP H0691324B2 JP 22973386 A JP22973386 A JP 22973386A JP 22973386 A JP22973386 A JP 22973386A JP H0691324 B2 JPH0691324 B2 JP H0691324B2
Authority
JP
Japan
Prior art keywords
wiring
wiring board
characteristic impedance
signal
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22973386A
Other languages
Japanese (ja)
Other versions
JPS6386495A (en
Inventor
俊夫 須藤
悟 二川
武史 宮城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22973386A priority Critical patent/JPH0691324B2/en
Publication of JPS6386495A publication Critical patent/JPS6386495A/en
Publication of JPH0691324B2 publication Critical patent/JPH0691324B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は、半導体集積回路素子特に高速の論理素子を実
装する配線基板に関する。
Description: [Object of the Invention] (Industrial field of application) The present invention relates to a wiring board on which a semiconductor integrated circuit device, particularly a high-speed logic device is mounted.

(従来の技術) 近年、半導体集積回路素子の分野では、GaAs(カリウム
砒素)ICのような高速領域まで論理動作を行う高速論理
素子の開発が盛んである。このような高速論理素子を実
装基板上に複数個搭載し動作させると、素子間の配線の
伝搬遅延や配線容量が、全体の論理動作スピードに大き
な影響を与える。
(Prior Art) In recent years, in the field of semiconductor integrated circuit devices, high-speed logic devices such as GaAs (potassium arsenide) ICs that perform logic operations up to high-speed regions have been actively developed. When a plurality of such high-speed logic elements are mounted on a mounting board and operated, the propagation delay of the wiring between the elements and the wiring capacitance greatly affect the overall logic operation speed.

通常の多層基板の配線構造としては、信号配線の特性イ
ンピーダンスを一定に保つために、信号配線の上、下面
を絶縁層を介して接地面あるいは、電源面等の導体面で
はさんだ第3図に示すようなストリップ線路といわれる
配線構造をとることが多い。
In order to keep the characteristic impedance of the signal wiring constant, the wiring structure of a normal multilayer board is shown in Fig. 3 in which the upper and lower surfaces of the signal wiring are sandwiched by a ground plane or a conductor plane such as a power plane through an insulating layer. In many cases, a wiring structure called a strip line as shown is adopted.

このような配線構造を有する配線基板において、配線容
量を低減するための方法としては、1つの手法は、信号
配線41をとりかこむ絶縁層42に、低誘電率材料を用いる
ことである。例えば、アルミナセラミック材(比誘電率
εr=9.5)やガラス・エポキシ材(εr=4.5)に対し
て、ポリイミド材(εr=3.8)やテフロン材(εr=2.
5)等を用いることである。
In a wiring board having such a wiring structure, as a method for reducing the wiring capacitance, one method is to use a low dielectric constant material for the insulating layer 42 surrounding the signal wiring 41. For example, alumina ceramic material (relative permittivity ε r = 9.5) and glass epoxy material (ε r = 4.5), polyimide material (ε r = 3.8) and Teflon material (ε r = 2.
5) etc. are to be used.

もう1つの手法は、配線構造上の工夫で、信号配線を
上、下にはさむ接地面あるいは電源面の導体面を格子状
のようにパターン化して形成し、信号の配線容量を低く
することである。第5図(a)は、このような配線基板
を上から見た透視図で、信号配線51に対し一定の空間的
周期を有する導体面53,54により絶縁層52を介してはさ
んだ構造で、上、下の導体面53,54は同一のパターンで
互いに重なっている。
The other method is to devise a wiring structure by patterning the conductor planes of the ground plane or the power plane that sandwich the signal lines above and below to form a grid pattern to reduce the signal wiring capacitance. is there. FIG. 5 (a) is a perspective view of such a wiring board as seen from above, showing a structure in which the conductor surfaces 53 and 54 having a constant spatial period with respect to the signal wiring 51 sandwich the insulating layer 52. The upper and lower conductor surfaces 53 and 54 overlap each other in the same pattern.

しかしながら、接地面や電源面を格子状にパターン化し
た場合、信号配線が、格子状導体面を通過するときに、
その特性インピーダンスが格子のピッチに対応して周期
的に変動し格子のピッチが粗いほど、変動値が大きくな
るという問題が生じていた。即ち、第5図(a)中、信
号配線方向に対して断面A−A′とB−B′のように異
なる位置関係の断面を第5図(b)(c)に示す。断面
A−A′での信号配線51と最近接導体面との配線容量は
図中C1A+C2Aである。これに対して断面B−B′では信
号配線51と最近接導体面との配線容量は2(C1B+C2B)とな
る。一般に、断面A−A′と断面B−B′での配線容量
は異なり、特性インピーダンスは格子パターンのピッチ
に対応して同期的に変動する。
However, when the ground plane or power plane is patterned in a grid pattern, when the signal wiring passes through the grid conductor surface,
The characteristic impedance periodically fluctuates corresponding to the pitch of the grid, and the coarser the pitch of the grid, the larger the fluctuation value. That is, FIGS. 5B and 5C show cross sections having different positional relations, such as cross sections AA ′ and BB ′ in the signal wiring direction in FIG. 5A. The wiring capacitance between the signal wiring 51 and the closest conductor surface at the cross section AA ′ is C 1A + C 2A in the figure. On the other hand, in the cross section BB ′, the wiring capacitance between the signal wiring 51 and the closest conductor surface is 2 (C 1B + C 2B ). Generally, the cross-section A-A 'and the cross-section B-B' have different wiring capacitances, and the characteristic impedance varies synchronously according to the pitch of the lattice pattern.

GaAsICのような高速論理素子は他の論理素子、例えばTT
LやECLに比べて、ノイズマージンが少ないため、特性イ
ンピーダンスの変動による信号反射は、全体の動作マー
ジンの減少や論理誤動作を起こしたり、波形歪みによる
時間変動を生じるという問題があった。
High-speed logic devices such as GaAs ICs can be replaced by other logic devices, such as TT
Since the noise margin is smaller than that of L or ECL, there are problems that signal reflection due to fluctuation of characteristic impedance causes a reduction in overall operation margin, logical malfunction, and time fluctuation due to waveform distortion.

(発明が解決しようとする問題点) このように以配線容量を低減するためのパターン化され
た導体面を有する配線構造は、信号配線の特性インピー
ダンスの変動を起こすという問題があった。本発明の目
的は、パターン化された導体面を用いながら、信号の特
性インピーダンスの変動をおさえた配線構造を有する配
線基板を提供することを目的とする。
(Problems to be Solved by the Invention) As described above, the wiring structure having the patterned conductor surface for reducing the wiring capacitance has a problem that the characteristic impedance of the signal wiring fluctuates. It is an object of the present invention to provide a wiring board having a wiring structure that suppresses fluctuations in signal characteristic impedance while using a patterned conductor surface.

〔発明の構成〕[Structure of Invention]

(問題点を解決するための手段) 上記、目的を達成するために、本発明は信号配線を絶縁
層を介して、上下にはさむ導体面をパターン周期の半分
だけ、互いにずらして形成したことを特徴とするもので
ある。
(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention provides that the signal wirings are formed with the insulating layer interposed therebetween so that the conductor surfaces sandwiched above and below are offset from each other by half the pattern period. It is a feature.

(作用) 本発明のように上、下導体面のパターンを互いにパター
ン周期の半分だけずらすと信号の配線方向に対し、変動
のピッチが1/2になり、配線容量の分布が均一化するた
めに、特性インピーダンスの変動量も減少する。
(Operation) When the patterns on the upper and lower conductor surfaces are shifted from each other by half the pattern period as in the present invention, the pitch of fluctuation becomes 1/2 with respect to the signal wiring direction, and the wiring capacitance distribution becomes uniform. In addition, the fluctuation amount of the characteristic impedance is also reduced.

(実施例) 本発明を以下図を参照して詳細に述べる。第1図は、本
発明の一実施例を示した透視図である。信号配線11は、
格子状にパターン化された上面の導体面13と下面の導体
面14で、絶縁層12を介してはさまれている。絶縁層12は
ポリイミド材等の有機樹脂材料よりなる。信号配線11
や、導体面13,14は銅等の電気伝導性の良い金属により
形成される。上下の導体面13,14は、同一の空間的くり
かえし周期を有するパターン、この例では格子状のパタ
ーンで形成される。この時、下部導体面14の格子点Q1〜
Q4は、上武導体面の格子点P1〜P4の頂度中間点になるよ
うに、くりかえし周期(図中Pで示す)の1/2だけずら
して形成する。本発明について信号配線方向に断面A−
A′とB−B′を比較すると第1図(b)(c)のよう
になり、上部と下部の導体の位置関係が逆転するだけ
で、配線容量C1A+2C2AとC2B+2C2Bは同一となる。従っ
て、断面A−A′での特性インピーダンスと断面B−
B′での特性インピーダンスでは同一となり、特性イン
ピーダンスの変動周期は1/2となる。第2図は、第1図
の断面位置に対して、特性インピーダンスの変動を示し
たものである。
(Example) The present invention will be described in detail below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of the present invention. The signal wiring 11 is
The upper conductor surface 13 and the lower conductor surface 14, which are patterned in a lattice pattern, are sandwiched by an insulating layer 12. The insulating layer 12 is made of an organic resin material such as a polyimide material. Signal wiring 11
Alternatively, the conductor surfaces 13 and 14 are formed of a metal having good electric conductivity such as copper. The upper and lower conductor surfaces 13 and 14 are formed in a pattern having the same spatial repeating period, in this example, a grid pattern. At this time, the grid points Q1 to
Q4 is formed by shifting by 1/2 of the repeating cycle (indicated by P in the figure) so that it is located at the midpoint of the vertex of the grid points P1 to P4 on the Jobu conductor surface. In the present invention, a cross section A- in the signal wiring direction
Comparing A ′ and BB ′ is as shown in FIGS. 1 (b) and (c), and the wiring capacities C 1A + 2C 2A and C 2B + 2C are obtained only by reversing the positional relationship between the upper and lower conductors. 2B will be the same. Therefore, the characteristic impedance in the section A-A 'and the section B-
The characteristic impedance in B'is the same, and the variation cycle of the characteristic impedance is 1/2. FIG. 2 shows the variation of the characteristic impedance with respect to the cross-sectional position of FIG.

本発明の場合(図中:L1で示す)、従来の場合(図中:L2
で示す)と比較すると断面位置A−A′とB−B′での
特性インピーダンスが等しくなり、また、その中間点C
−C′では同一断面構造となるためL1とL2はC−C′で
交わる。従って、変動の周期は実質的に1/4となり変動
分は大幅に改善される。
In the case of the present invention (indicated by L1 in the figure) and in the conventional case (indicated by L2 in the figure)
Characteristic) at the cross-section positions AA ′ and BB ′ are equal to each other, and the intermediate point C
Since -C 'has the same sectional structure, L1 and L2 intersect at CC'. Therefore, the fluctuation period is substantially 1/4, and the fluctuation amount is greatly improved.

第3図は本発明を多層基板に適用した実施例を示したも
ので、信号配線31,31′は絶縁層32を介して接地面ある
いは電源面の導体面33,34,35で多層にはさまれた構造を
有している。この時、導体面33,34,35は互いにパターン
周期を1/2だけずらして形成したものである。36はICで
ある。
FIG. 3 shows an embodiment in which the present invention is applied to a multi-layer substrate, in which the signal wirings 31 and 31 'are connected to the ground plane or the conductor planes 33, 34 and 35 of the power plane through the insulating layer 32 to form a multi-layer. It has a sandwiched structure. At this time, the conductor surfaces 33, 34, and 35 are formed by shifting the pattern period from each other by 1/2. 36 is an IC.

〔発明の効果〕〔The invention's effect〕

本発明によれば、配線容量を低減させる接地面や電源面
等の導体面をくりかえし周期を有するパターンを互いに
くりかえし周期の半分だけずらして形成するCCにより特
性インピーダンスの変動は小さくなる。
According to the present invention, the variation of the characteristic impedance is reduced by the CC formed by repeatedly forming the patterns having the repeating period on the conductor planes such as the ground plane and the power plane for reducing the wiring capacitance, by shifting the patterns by the half cycle.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明に係わる配線基板の透視図、断面図、第
2図は本発明と従来例の特性インピーダンス2の変動を
比較した図、第3図は多層基板の実施例を示す図、第4
図はストリップ線路の断面構造を示す図、第5図は従来
の配線基板の透視図及び断面図である。 11,31,41,51……信号配線、 12,32,42,52……絶縁層、 13,14,33,34,53,54……接地面あるいは電源面。
FIG. 1 is a perspective view and a sectional view of a wiring board according to the present invention, FIG. 2 is a view comparing variations of the characteristic impedance 2 of the present invention and a conventional example, and FIG. 3 is a view showing an embodiment of a multilayer board, Fourth
FIG. 5 is a view showing a cross-sectional structure of a strip line, and FIG. 5 is a perspective view and a cross-sectional view of a conventional wiring board. 11,31,41,51 …… Signal wiring, 12,32,42,52 …… Insulating layer, 13,14,33,34,53,54 …… Ground plane or power plane.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】信号配線を絶縁層を介して、上面及び下面
を導体面ではさむ構造を有する配線基板において、上面
及び下面はほぼ同一の一定周期を有するパターン化され
た導体により形成され、互いに周期の半分ずらして形成
していることを特徴とする配線基板。
1. A wiring board having a structure in which an upper surface and a lower surface are sandwiched by conductor surfaces with an insulating layer sandwiching a signal wiring, and the upper surface and the lower surface are formed of patterned conductors having substantially the same constant period, A wiring board characterized by being formed with a shift of half the cycle.
JP22973386A 1986-09-30 1986-09-30 Wiring board Expired - Lifetime JPH0691324B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22973386A JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22973386A JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Publications (2)

Publication Number Publication Date
JPS6386495A JPS6386495A (en) 1988-04-16
JPH0691324B2 true JPH0691324B2 (en) 1994-11-14

Family

ID=16896835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22973386A Expired - Lifetime JPH0691324B2 (en) 1986-09-30 1986-09-30 Wiring board

Country Status (1)

Country Link
JP (1) JPH0691324B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2579046B2 (en) * 1990-09-19 1997-02-05 日本電気株式会社 Multilayer wiring board
JPH04132295A (en) * 1990-09-21 1992-05-06 Nec Corp Multilayer wiring board
JP2015231105A (en) * 2014-06-04 2015-12-21 三菱電機株式会社 Strip line
JP2024038529A (en) * 2021-01-21 2024-03-21 株式会社フジクラ wiring board

Also Published As

Publication number Publication date
JPS6386495A (en) 1988-04-16

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