JPS6385311A - フラットネス測定装置 - Google Patents

フラットネス測定装置

Info

Publication number
JPS6385311A
JPS6385311A JP22986686A JP22986686A JPS6385311A JP S6385311 A JPS6385311 A JP S6385311A JP 22986686 A JP22986686 A JP 22986686A JP 22986686 A JP22986686 A JP 22986686A JP S6385311 A JPS6385311 A JP S6385311A
Authority
JP
Japan
Prior art keywords
measuring
measured
sensor
arm
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22986686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449046B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Ogawa
小河　博
Haruo Yoshida
晴夫 吉田
Shuji Okamoto
修二 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP22986686A priority Critical patent/JPS6385311A/ja
Publication of JPS6385311A publication Critical patent/JPS6385311A/ja
Publication of JPH0449046B2 publication Critical patent/JPH0449046B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP22986686A 1986-09-30 1986-09-30 フラットネス測定装置 Granted JPS6385311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22986686A JPS6385311A (ja) 1986-09-30 1986-09-30 フラットネス測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22986686A JPS6385311A (ja) 1986-09-30 1986-09-30 フラットネス測定装置

Publications (2)

Publication Number Publication Date
JPS6385311A true JPS6385311A (ja) 1988-04-15
JPH0449046B2 JPH0449046B2 (enrdf_load_stackoverflow) 1992-08-10

Family

ID=16898925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22986686A Granted JPS6385311A (ja) 1986-09-30 1986-09-30 フラットネス測定装置

Country Status (1)

Country Link
JP (1) JPS6385311A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281463A (ja) * 2007-05-11 2008-11-20 Lasertec Corp 光学測定装置、光学測定方法、パターン基板の製造方法、及び直線往復動装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61200419A (ja) * 1985-03-01 1986-09-05 Mitsutoyo Mfg Co Ltd 測定機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61200419A (ja) * 1985-03-01 1986-09-05 Mitsutoyo Mfg Co Ltd 測定機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008281463A (ja) * 2007-05-11 2008-11-20 Lasertec Corp 光学測定装置、光学測定方法、パターン基板の製造方法、及び直線往復動装置

Also Published As

Publication number Publication date
JPH0449046B2 (enrdf_load_stackoverflow) 1992-08-10

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