JPS638424Y2 - - Google Patents

Info

Publication number
JPS638424Y2
JPS638424Y2 JP2879384U JP2879384U JPS638424Y2 JP S638424 Y2 JPS638424 Y2 JP S638424Y2 JP 2879384 U JP2879384 U JP 2879384U JP 2879384 U JP2879384 U JP 2879384U JP S638424 Y2 JPS638424 Y2 JP S638424Y2
Authority
JP
Japan
Prior art keywords
oxygen concentration
irradiation chamber
gas
irradiation
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2879384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60140641U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2879384U priority Critical patent/JPS60140641U/ja
Publication of JPS60140641U publication Critical patent/JPS60140641U/ja
Application granted granted Critical
Publication of JPS638424Y2 publication Critical patent/JPS638424Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2879384U 1984-02-28 1984-02-28 荷電粒子照射装置 Granted JPS60140641U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2879384U JPS60140641U (ja) 1984-02-28 1984-02-28 荷電粒子照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2879384U JPS60140641U (ja) 1984-02-28 1984-02-28 荷電粒子照射装置

Publications (2)

Publication Number Publication Date
JPS60140641U JPS60140641U (ja) 1985-09-18
JPS638424Y2 true JPS638424Y2 (enExample) 1988-03-14

Family

ID=30527004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2879384U Granted JPS60140641U (ja) 1984-02-28 1984-02-28 荷電粒子照射装置

Country Status (1)

Country Link
JP (1) JPS60140641U (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001026803A1 (en) 1999-10-12 2001-04-19 Toyo Ink Manufacturing Co., Ltd. Method and apparatus for irradiating active energy ray
JP4641844B2 (ja) * 2005-03-25 2011-03-02 大日本印刷株式会社 電子線照射装置
JP2010054407A (ja) * 2008-08-29 2010-03-11 Univ Of Fukui 電子線照射装置及び電子線照射方法

Also Published As

Publication number Publication date
JPS60140641U (ja) 1985-09-18

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