JPS638187B2 - - Google Patents
Info
- Publication number
- JPS638187B2 JPS638187B2 JP53050793A JP5079378A JPS638187B2 JP S638187 B2 JPS638187 B2 JP S638187B2 JP 53050793 A JP53050793 A JP 53050793A JP 5079378 A JP5079378 A JP 5079378A JP S638187 B2 JPS638187 B2 JP S638187B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- processed
- substrate
- determination circuit
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5079378A JPS54142143A (en) | 1978-04-27 | 1978-04-27 | Dry type etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5079378A JPS54142143A (en) | 1978-04-27 | 1978-04-27 | Dry type etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54142143A JPS54142143A (en) | 1979-11-06 |
| JPS638187B2 true JPS638187B2 (enrdf_load_stackoverflow) | 1988-02-22 |
Family
ID=12868670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5079378A Granted JPS54142143A (en) | 1978-04-27 | 1978-04-27 | Dry type etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54142143A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59116366U (ja) * | 1983-01-28 | 1984-08-06 | 株式会社日立製作所 | エレベ−タ−ガイドレ−ルの清掃装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5135639A (ja) * | 1974-09-20 | 1976-03-26 | Hitachi Ltd | Himakunopurazumaetsuchingushorishutenkenshutsuho |
| CA1071579A (en) * | 1976-09-13 | 1980-02-12 | Northern Telecom Limited | End point control in plasma etching |
-
1978
- 1978-04-27 JP JP5079378A patent/JPS54142143A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54142143A (en) | 1979-11-06 |
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