JPS54142143A - Dry type etching device - Google Patents

Dry type etching device

Info

Publication number
JPS54142143A
JPS54142143A JP5079378A JP5079378A JPS54142143A JP S54142143 A JPS54142143 A JP S54142143A JP 5079378 A JP5079378 A JP 5079378A JP 5079378 A JP5079378 A JP 5079378A JP S54142143 A JPS54142143 A JP S54142143A
Authority
JP
Japan
Prior art keywords
etching
amplifier
completion
spectrum
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5079378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS638187B2 (enrdf_load_stackoverflow
Inventor
Kunio Hanazawa
Katsuzo Ukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP5079378A priority Critical patent/JPS54142143A/ja
Publication of JPS54142143A publication Critical patent/JPS54142143A/ja
Publication of JPS638187B2 publication Critical patent/JPS638187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP5079378A 1978-04-27 1978-04-27 Dry type etching device Granted JPS54142143A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5079378A JPS54142143A (en) 1978-04-27 1978-04-27 Dry type etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5079378A JPS54142143A (en) 1978-04-27 1978-04-27 Dry type etching device

Publications (2)

Publication Number Publication Date
JPS54142143A true JPS54142143A (en) 1979-11-06
JPS638187B2 JPS638187B2 (enrdf_load_stackoverflow) 1988-02-22

Family

ID=12868670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5079378A Granted JPS54142143A (en) 1978-04-27 1978-04-27 Dry type etching device

Country Status (1)

Country Link
JP (1) JPS54142143A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59116366U (ja) * 1983-01-28 1984-08-06 株式会社日立製作所 エレベ−タ−ガイドレ−ルの清掃装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135639A (ja) * 1974-09-20 1976-03-26 Hitachi Ltd Himakunopurazumaetsuchingushorishutenkenshutsuho
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135639A (ja) * 1974-09-20 1976-03-26 Hitachi Ltd Himakunopurazumaetsuchingushorishutenkenshutsuho
JPS5334641A (en) * 1976-09-13 1978-03-31 Northern Telecom Ltd Method of and apparatus for controlling terminal point of plasma etching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59116366U (ja) * 1983-01-28 1984-08-06 株式会社日立製作所 エレベ−タ−ガイドレ−ルの清掃装置

Also Published As

Publication number Publication date
JPS638187B2 (enrdf_load_stackoverflow) 1988-02-22

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