JPS5135639A - Himakunopurazumaetsuchingushorishutenkenshutsuho - Google Patents
HimakunopurazumaetsuchingushorishutenkenshutsuhoInfo
- Publication number
- JPS5135639A JPS5135639A JP10776674A JP10776674A JPS5135639A JP S5135639 A JPS5135639 A JP S5135639A JP 10776674 A JP10776674 A JP 10776674A JP 10776674 A JP10776674 A JP 10776674A JP S5135639 A JPS5135639 A JP S5135639A
- Authority
- JP
- Japan
- Prior art keywords
- himakunopurazuma
- etsuchingushorishutenkenshutsuho
- himakunopurazuma etsuchingushorishutenkenshutsuho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10776674A JPS5135639A (ja) | 1974-09-20 | 1974-09-20 | Himakunopurazumaetsuchingushorishutenkenshutsuho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10776674A JPS5135639A (ja) | 1974-09-20 | 1974-09-20 | Himakunopurazumaetsuchingushorishutenkenshutsuho |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5135639A true JPS5135639A (ja) | 1976-03-26 |
JPS5424697B2 JPS5424697B2 (ja) | 1979-08-23 |
Family
ID=14467445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10776674A Granted JPS5135639A (ja) | 1974-09-20 | 1974-09-20 | Himakunopurazumaetsuchingushorishutenkenshutsuho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5135639A (ja) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5164433A (ja) * | 1974-11-30 | 1976-06-03 | Dainippon Printing Co Ltd | Shotsukokukakohoho |
JPS5334641A (en) * | 1976-09-13 | 1978-03-31 | Northern Telecom Ltd | Method of and apparatus for controlling terminal point of plasma etching |
JPS5448172A (en) * | 1977-09-24 | 1979-04-16 | Tokyo Ouka Kougiyou Kk | Plasma reaction processor |
JPS54142143A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Dry type etching device |
JPS54142144A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Control of dry etching |
JPS5591829A (en) * | 1979-01-02 | 1980-07-11 | Motorola Inc | Plasma producing process controller |
JPS5685129U (ja) * | 1979-11-28 | 1981-07-08 | ||
JPS5690976A (en) * | 1979-12-21 | 1981-07-23 | Hitachi Ltd | Controlling method for dry etching |
JPS5792510A (en) * | 1980-11-25 | 1982-06-09 | Oki Electric Ind Co Ltd | Etching of silicon nitride film |
JPS59116366U (ja) * | 1983-01-28 | 1984-08-06 | 株式会社日立製作所 | エレベ−タ−ガイドレ−ルの清掃装置 |
US4528438A (en) * | 1976-09-16 | 1985-07-09 | Northern Telecom Limited | End point control in plasma etching |
JPS62165935A (ja) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | アツシング終点検出装置 |
JPS6324263U (ja) * | 1987-07-14 | 1988-02-17 | ||
JPS6389684A (ja) * | 1986-10-01 | 1988-04-20 | Hitachi Electronics Eng Co Ltd | クリ−ニング終点検出方式 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492482A (ja) * | 1972-04-18 | 1974-01-10 |
-
1974
- 1974-09-20 JP JP10776674A patent/JPS5135639A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS492482A (ja) * | 1972-04-18 | 1974-01-10 |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5432621B2 (ja) * | 1974-11-30 | 1979-10-16 | ||
JPS5164433A (ja) * | 1974-11-30 | 1976-06-03 | Dainippon Printing Co Ltd | Shotsukokukakohoho |
JPS6013072B2 (ja) * | 1976-09-13 | 1985-04-04 | ノ−ザン・テレコム・リミテツド | プラズマエツチングの終点制御方法および装置 |
JPS5334641A (en) * | 1976-09-13 | 1978-03-31 | Northern Telecom Ltd | Method of and apparatus for controlling terminal point of plasma etching |
US4528438A (en) * | 1976-09-16 | 1985-07-09 | Northern Telecom Limited | End point control in plasma etching |
JPS5448172A (en) * | 1977-09-24 | 1979-04-16 | Tokyo Ouka Kougiyou Kk | Plasma reaction processor |
JPS54142143A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Dry type etching device |
JPS54142144A (en) * | 1978-04-27 | 1979-11-06 | Anelva Corp | Control of dry etching |
JPS627274B2 (ja) * | 1978-04-27 | 1987-02-16 | Nichiden Anelva Kk | |
JPS638187B2 (ja) * | 1978-04-27 | 1988-02-22 | Nichiden Anelva Kk | |
JPS5591829A (en) * | 1979-01-02 | 1980-07-11 | Motorola Inc | Plasma producing process controller |
JPS63191628U (ja) * | 1979-01-02 | 1988-12-09 | ||
JPS5685129U (ja) * | 1979-11-28 | 1981-07-08 | ||
JPS5690976A (en) * | 1979-12-21 | 1981-07-23 | Hitachi Ltd | Controlling method for dry etching |
JPS5792510A (en) * | 1980-11-25 | 1982-06-09 | Oki Electric Ind Co Ltd | Etching of silicon nitride film |
JPS59116366U (ja) * | 1983-01-28 | 1984-08-06 | 株式会社日立製作所 | エレベ−タ−ガイドレ−ルの清掃装置 |
JPS62165935A (ja) * | 1986-01-17 | 1987-07-22 | Tokyo Electron Ltd | アツシング終点検出装置 |
JPS6389684A (ja) * | 1986-10-01 | 1988-04-20 | Hitachi Electronics Eng Co Ltd | クリ−ニング終点検出方式 |
JPS6324263U (ja) * | 1987-07-14 | 1988-02-17 |
Also Published As
Publication number | Publication date |
---|---|
JPS5424697B2 (ja) | 1979-08-23 |
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