JPS6378444A - 電子ビ−ム装置 - Google Patents

電子ビ−ム装置

Info

Publication number
JPS6378444A
JPS6378444A JP61220847A JP22084786A JPS6378444A JP S6378444 A JPS6378444 A JP S6378444A JP 61220847 A JP61220847 A JP 61220847A JP 22084786 A JP22084786 A JP 22084786A JP S6378444 A JPS6378444 A JP S6378444A
Authority
JP
Japan
Prior art keywords
grid
electron beam
analysis
objective lens
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61220847A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565968B2 (enrdf_load_stackoverflow
Inventor
Akio Ito
昭夫 伊藤
Kazuyuki Ozaki
一幸 尾崎
Kazuo Okubo
大窪　和生
Toshihiro Ishizuka
俊弘 石塚
Yoshiaki Goto
後藤　善朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61220847A priority Critical patent/JPS6378444A/ja
Publication of JPS6378444A publication Critical patent/JPS6378444A/ja
Publication of JPH0565968B2 publication Critical patent/JPH0565968B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61220847A 1986-09-20 1986-09-20 電子ビ−ム装置 Granted JPS6378444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61220847A JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61220847A JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS6378444A true JPS6378444A (ja) 1988-04-08
JPH0565968B2 JPH0565968B2 (enrdf_load_stackoverflow) 1993-09-20

Family

ID=16757473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61220847A Granted JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS6378444A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517028A (en) * 1993-12-07 1996-05-14 Fujitsu Limited Electron beam apparatus for measuring a voltage of a sample

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517028A (en) * 1993-12-07 1996-05-14 Fujitsu Limited Electron beam apparatus for measuring a voltage of a sample

Also Published As

Publication number Publication date
JPH0565968B2 (enrdf_load_stackoverflow) 1993-09-20

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