JPS6378069U - - Google Patents
Info
- Publication number
- JPS6378069U JPS6378069U JP17224586U JP17224586U JPS6378069U JP S6378069 U JPS6378069 U JP S6378069U JP 17224586 U JP17224586 U JP 17224586U JP 17224586 U JP17224586 U JP 17224586U JP S6378069 U JPS6378069 U JP S6378069U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- film
- contact
- circumferential contact
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17224586U JPS6378069U (zh) | 1986-11-10 | 1986-11-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17224586U JPS6378069U (zh) | 1986-11-10 | 1986-11-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6378069U true JPS6378069U (zh) | 1988-05-24 |
Family
ID=31108613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17224586U Pending JPS6378069U (zh) | 1986-11-10 | 1986-11-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6378069U (zh) |
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1986
- 1986-11-10 JP JP17224586U patent/JPS6378069U/ja active Pending