JPH01129257U - - Google Patents
Info
- Publication number
- JPH01129257U JPH01129257U JP2556588U JP2556588U JPH01129257U JP H01129257 U JPH01129257 U JP H01129257U JP 2556588 U JP2556588 U JP 2556588U JP 2556588 U JP2556588 U JP 2556588U JP H01129257 U JPH01129257 U JP H01129257U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- thin film
- power supply
- evaporation source
- deposition chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2556588U JPH01129257U (zh) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2556588U JPH01129257U (zh) | 1988-02-25 | 1988-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129257U true JPH01129257U (zh) | 1989-09-04 |
Family
ID=31246412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2556588U Pending JPH01129257U (zh) | 1988-02-25 | 1988-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129257U (zh) |
-
1988
- 1988-02-25 JP JP2556588U patent/JPH01129257U/ja active Pending