JPS62114056U - - Google Patents
Info
- Publication number
- JPS62114056U JPS62114056U JP20155685U JP20155685U JPS62114056U JP S62114056 U JPS62114056 U JP S62114056U JP 20155685 U JP20155685 U JP 20155685U JP 20155685 U JP20155685 U JP 20155685U JP S62114056 U JPS62114056 U JP S62114056U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- evaporation source
- back side
- heat
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20155685U JPS62114056U (zh) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20155685U JPS62114056U (zh) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62114056U true JPS62114056U (zh) | 1987-07-20 |
Family
ID=31165120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20155685U Pending JPS62114056U (zh) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62114056U (zh) |
-
1985
- 1985-12-24 JP JP20155685U patent/JPS62114056U/ja active Pending