JPS62141062U - - Google Patents

Info

Publication number
JPS62141062U
JPS62141062U JP2623086U JP2623086U JPS62141062U JP S62141062 U JPS62141062 U JP S62141062U JP 2623086 U JP2623086 U JP 2623086U JP 2623086 U JP2623086 U JP 2623086U JP S62141062 U JPS62141062 U JP S62141062U
Authority
JP
Japan
Prior art keywords
work coil
crucibles
disposed
heating device
passed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2623086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2623086U priority Critical patent/JPS62141062U/ja
Publication of JPS62141062U publication Critical patent/JPS62141062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2623086U 1986-02-25 1986-02-25 Pending JPS62141062U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2623086U JPS62141062U (zh) 1986-02-25 1986-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2623086U JPS62141062U (zh) 1986-02-25 1986-02-25

Publications (1)

Publication Number Publication Date
JPS62141062U true JPS62141062U (zh) 1987-09-05

Family

ID=30827115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2623086U Pending JPS62141062U (zh) 1986-02-25 1986-02-25

Country Status (1)

Country Link
JP (1) JPS62141062U (zh)

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