JPS63143570U - - Google Patents
Info
- Publication number
- JPS63143570U JPS63143570U JP3493387U JP3493387U JPS63143570U JP S63143570 U JPS63143570 U JP S63143570U JP 3493387 U JP3493387 U JP 3493387U JP 3493387 U JP3493387 U JP 3493387U JP S63143570 U JPS63143570 U JP S63143570U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- film
- winding
- vacuum chamber
- degassed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 4
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3493387U JPS63143570U (zh) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3493387U JPS63143570U (zh) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63143570U true JPS63143570U (zh) | 1988-09-21 |
Family
ID=30843952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3493387U Pending JPS63143570U (zh) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63143570U (zh) |
-
1987
- 1987-03-10 JP JP3493387U patent/JPS63143570U/ja active Pending