JPS6255559U - - Google Patents

Info

Publication number
JPS6255559U
JPS6255559U JP14733485U JP14733485U JPS6255559U JP S6255559 U JPS6255559 U JP S6255559U JP 14733485 U JP14733485 U JP 14733485U JP 14733485 U JP14733485 U JP 14733485U JP S6255559 U JPS6255559 U JP S6255559U
Authority
JP
Japan
Prior art keywords
film
chamber
unwinding
roll coater
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14733485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230444Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985147334U priority Critical patent/JPH0230444Y2/ja
Publication of JPS6255559U publication Critical patent/JPS6255559U/ja
Application granted granted Critical
Publication of JPH0230444Y2 publication Critical patent/JPH0230444Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1985147334U 1985-09-28 1985-09-28 Expired JPH0230444Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985147334U JPH0230444Y2 (zh) 1985-09-28 1985-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985147334U JPH0230444Y2 (zh) 1985-09-28 1985-09-28

Publications (2)

Publication Number Publication Date
JPS6255559U true JPS6255559U (zh) 1987-04-06
JPH0230444Y2 JPH0230444Y2 (zh) 1990-08-16

Family

ID=31060599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985147334U Expired JPH0230444Y2 (zh) 1985-09-28 1985-09-28

Country Status (1)

Country Link
JP (1) JPH0230444Y2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013473A (ja) * 2007-07-05 2009-01-22 Dainippon Printing Co Ltd 薄膜形成装置および薄膜形成方法
JP2011153340A (ja) * 2010-01-26 2011-08-11 Fuji Electric Co Ltd 可撓性基板の処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5809070B2 (ja) * 2012-01-11 2015-11-10 クラレファスニング株式会社 面ファスナーを有する積層体及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173266A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS59173267A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS6067671A (ja) * 1983-09-24 1985-04-18 Anelva Corp 薄膜作成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173266A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS59173267A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS6067671A (ja) * 1983-09-24 1985-04-18 Anelva Corp 薄膜作成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013473A (ja) * 2007-07-05 2009-01-22 Dainippon Printing Co Ltd 薄膜形成装置および薄膜形成方法
JP2011153340A (ja) * 2010-01-26 2011-08-11 Fuji Electric Co Ltd 可撓性基板の処理装置

Also Published As

Publication number Publication date
JPH0230444Y2 (zh) 1990-08-16

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