JPS61137661U - - Google Patents
Info
- Publication number
- JPS61137661U JPS61137661U JP1785885U JP1785885U JPS61137661U JP S61137661 U JPS61137661 U JP S61137661U JP 1785885 U JP1785885 U JP 1785885U JP 1785885 U JP1785885 U JP 1785885U JP S61137661 U JPS61137661 U JP S61137661U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- target
- substrate
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1785885U JPS61137661U (zh) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1785885U JPS61137661U (zh) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61137661U true JPS61137661U (zh) | 1986-08-27 |
Family
ID=30505955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1785885U Pending JPS61137661U (zh) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61137661U (zh) |
-
1985
- 1985-02-13 JP JP1785885U patent/JPS61137661U/ja active Pending
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