JPS6418148U - - Google Patents
Info
- Publication number
- JPS6418148U JPS6418148U JP11326587U JP11326587U JPS6418148U JP S6418148 U JPS6418148 U JP S6418148U JP 11326587 U JP11326587 U JP 11326587U JP 11326587 U JP11326587 U JP 11326587U JP S6418148 U JPS6418148 U JP S6418148U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical
- targets
- vacuum chamber
- sputtering device
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11326587U JPS6418148U (zh) | 1987-07-23 | 1987-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11326587U JPS6418148U (zh) | 1987-07-23 | 1987-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418148U true JPS6418148U (zh) | 1989-01-30 |
Family
ID=31352942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11326587U Pending JPS6418148U (zh) | 1987-07-23 | 1987-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418148U (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607191A (ja) * | 1983-06-24 | 1985-01-14 | 三容真空工業株式会社 | 回路基板の製造方法及びその装置 |
-
1987
- 1987-07-23 JP JP11326587U patent/JPS6418148U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607191A (ja) * | 1983-06-24 | 1985-01-14 | 三容真空工業株式会社 | 回路基板の製造方法及びその装置 |