JPS61120755U - - Google Patents
Info
- Publication number
- JPS61120755U JPS61120755U JP266285U JP266285U JPS61120755U JP S61120755 U JPS61120755 U JP S61120755U JP 266285 U JP266285 U JP 266285U JP 266285 U JP266285 U JP 266285U JP S61120755 U JPS61120755 U JP S61120755U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- disk
- evaporation
- forming apparatus
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP266285U JPS61120755U (zh) | 1985-01-12 | 1985-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP266285U JPS61120755U (zh) | 1985-01-12 | 1985-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120755U true JPS61120755U (zh) | 1986-07-30 |
Family
ID=30476552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP266285U Pending JPS61120755U (zh) | 1985-01-12 | 1985-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120755U (zh) |
-
1985
- 1985-01-12 JP JP266285U patent/JPS61120755U/ja active Pending