JPS63736B2 - - Google Patents

Info

Publication number
JPS63736B2
JPS63736B2 JP56207632A JP20763281A JPS63736B2 JP S63736 B2 JPS63736 B2 JP S63736B2 JP 56207632 A JP56207632 A JP 56207632A JP 20763281 A JP20763281 A JP 20763281A JP S63736 B2 JPS63736 B2 JP S63736B2
Authority
JP
Japan
Prior art keywords
gas
tin oxide
detector
grain size
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56207632A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58106450A (ja
Inventor
Tadashi Tonomura
Satoshi Sekido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56207632A priority Critical patent/JPS58106450A/ja
Publication of JPS58106450A publication Critical patent/JPS58106450A/ja
Publication of JPS63736B2 publication Critical patent/JPS63736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP56207632A 1981-12-21 1981-12-21 No2ガス検知方法 Granted JPS58106450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56207632A JPS58106450A (ja) 1981-12-21 1981-12-21 No2ガス検知方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56207632A JPS58106450A (ja) 1981-12-21 1981-12-21 No2ガス検知方法

Publications (2)

Publication Number Publication Date
JPS58106450A JPS58106450A (ja) 1983-06-24
JPS63736B2 true JPS63736B2 (enrdf_load_stackoverflow) 1988-01-08

Family

ID=16543005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56207632A Granted JPS58106450A (ja) 1981-12-21 1981-12-21 No2ガス検知方法

Country Status (1)

Country Link
JP (1) JPS58106450A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158549A (ja) * 1982-03-16 1983-09-20 Matsushita Electric Ind Co Ltd No↓2ガス検知器

Also Published As

Publication number Publication date
JPS58106450A (ja) 1983-06-24

Similar Documents

Publication Publication Date Title
US4307373A (en) Solid state sensor element
JPH08313470A (ja) ガス混合物中のメタンの検出法
JPS58124943A (ja) マイクロヒ−タ付き限界電流式酸素センサとそれを用いた限界電流式酸素濃度検出装置
JPH0517650Y2 (enrdf_load_stackoverflow)
GB2142147A (en) Gas sensor
JPS63736B2 (enrdf_load_stackoverflow)
JP2844286B2 (ja) 窒素酸化物検出素子およびその製造方法
JPH0765977B2 (ja) ガスセンサ用の不活性、触媒作用性またはガス感受性セラミック層の製造法
JP3903181B2 (ja) 抵抗型酸素センサとそれを使った酸素センサ装置及び空燃比制御システム
JPH0228823B2 (enrdf_load_stackoverflow)
JPS58105049A (ja) No↓2ガス検知器ならびに検知方法
JPH02662B2 (enrdf_load_stackoverflow)
JP2615138B2 (ja) 複合ガスセンサ
JPH0862168A (ja) 窒素酸化物検出素子
JPS6152420B2 (enrdf_load_stackoverflow)
SU989422A1 (ru) Датчик влажности и температуры
JPS5811844A (ja) No↓2ガス検知器及び検知方法
RU2795666C1 (ru) Газоаналитический мультисенсорный чип на основе ZnO и способ его изготовления на основе золь-гель технологии
JPH06288952A (ja) ガスセンサ
JPH07218460A (ja) NOxガス検知半導体およびその製造方法
JP3919307B2 (ja) 空気汚染検出用熱線型半導体式ガス検知素子
JPS5990040A (ja) 一酸化炭素ガス検知器
JP2849588B2 (ja) 薄膜ガスセンサ及びその製造方法
JP3919305B2 (ja) 空気汚染検出用熱線型半導体式ガス検知素子
JPH038507B2 (enrdf_load_stackoverflow)