JPS6373360U - - Google Patents

Info

Publication number
JPS6373360U
JPS6373360U JP16840186U JP16840186U JPS6373360U JP S6373360 U JPS6373360 U JP S6373360U JP 16840186 U JP16840186 U JP 16840186U JP 16840186 U JP16840186 U JP 16840186U JP S6373360 U JPS6373360 U JP S6373360U
Authority
JP
Japan
Prior art keywords
vapor deposition
shutter
source
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16840186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543090Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16840186U priority Critical patent/JPH0543090Y2/ja
Publication of JPS6373360U publication Critical patent/JPS6373360U/ja
Application granted granted Critical
Publication of JPH0543090Y2 publication Critical patent/JPH0543090Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16840186U 1986-10-31 1986-10-31 Expired - Lifetime JPH0543090Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16840186U JPH0543090Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16840186U JPH0543090Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Publications (2)

Publication Number Publication Date
JPS6373360U true JPS6373360U (enrdf_load_stackoverflow) 1988-05-16
JPH0543090Y2 JPH0543090Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=31101250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16840186U Expired - Lifetime JPH0543090Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Country Status (1)

Country Link
JP (1) JPH0543090Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0543090Y2 (enrdf_load_stackoverflow) 1993-10-29

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