JPS63183261U - - Google Patents

Info

Publication number
JPS63183261U
JPS63183261U JP7423887U JP7423887U JPS63183261U JP S63183261 U JPS63183261 U JP S63183261U JP 7423887 U JP7423887 U JP 7423887U JP 7423887 U JP7423887 U JP 7423887U JP S63183261 U JPS63183261 U JP S63183261U
Authority
JP
Japan
Prior art keywords
sputtering device
bonding
magnetron sputtering
plate
backing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7423887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516215Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7423887U priority Critical patent/JPH0516215Y2/ja
Publication of JPS63183261U publication Critical patent/JPS63183261U/ja
Application granted granted Critical
Publication of JPH0516215Y2 publication Critical patent/JPH0516215Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7423887U 1987-05-18 1987-05-18 Expired - Lifetime JPH0516215Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7423887U JPH0516215Y2 (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7423887U JPH0516215Y2 (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Publications (2)

Publication Number Publication Date
JPS63183261U true JPS63183261U (enrdf_load_stackoverflow) 1988-11-25
JPH0516215Y2 JPH0516215Y2 (enrdf_load_stackoverflow) 1993-04-28

Family

ID=30919268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7423887U Expired - Lifetime JPH0516215Y2 (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPH0516215Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0516215Y2 (enrdf_load_stackoverflow) 1993-04-28

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