JPS63131755U - - Google Patents

Info

Publication number
JPS63131755U
JPS63131755U JP2269787U JP2269787U JPS63131755U JP S63131755 U JPS63131755 U JP S63131755U JP 2269787 U JP2269787 U JP 2269787U JP 2269787 U JP2269787 U JP 2269787U JP S63131755 U JPS63131755 U JP S63131755U
Authority
JP
Japan
Prior art keywords
target
thickened
utility
sputtering target
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2269787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2269787U priority Critical patent/JPS63131755U/ja
Publication of JPS63131755U publication Critical patent/JPS63131755U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2269787U 1987-02-20 1987-02-20 Pending JPS63131755U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2269787U JPS63131755U (enrdf_load_stackoverflow) 1987-02-20 1987-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2269787U JPS63131755U (enrdf_load_stackoverflow) 1987-02-20 1987-02-20

Publications (1)

Publication Number Publication Date
JPS63131755U true JPS63131755U (enrdf_load_stackoverflow) 1988-08-29

Family

ID=30820326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2269787U Pending JPS63131755U (enrdf_load_stackoverflow) 1987-02-20 1987-02-20

Country Status (1)

Country Link
JP (1) JPS63131755U (enrdf_load_stackoverflow)

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