JPS6373356U - - Google Patents

Info

Publication number
JPS6373356U
JPS6373356U JP16786286U JP16786286U JPS6373356U JP S6373356 U JPS6373356 U JP S6373356U JP 16786286 U JP16786286 U JP 16786286U JP 16786286 U JP16786286 U JP 16786286U JP S6373356 U JPS6373356 U JP S6373356U
Authority
JP
Japan
Prior art keywords
holder
target
frequency sputtering
high frequency
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16786286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH033574Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16786286U priority Critical patent/JPH033574Y2/ja
Publication of JPS6373356U publication Critical patent/JPS6373356U/ja
Application granted granted Critical
Publication of JPH033574Y2 publication Critical patent/JPH033574Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16786286U 1986-10-31 1986-10-31 Expired JPH033574Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16786286U JPH033574Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16786286U JPH033574Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Publications (2)

Publication Number Publication Date
JPS6373356U true JPS6373356U (enrdf_load_stackoverflow) 1988-05-16
JPH033574Y2 JPH033574Y2 (enrdf_load_stackoverflow) 1991-01-30

Family

ID=31100195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16786286U Expired JPH033574Y2 (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Country Status (1)

Country Link
JP (1) JPH033574Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH033574Y2 (enrdf_load_stackoverflow) 1991-01-30

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