JPS62104436U - - Google Patents

Info

Publication number
JPS62104436U
JPS62104436U JP19722885U JP19722885U JPS62104436U JP S62104436 U JPS62104436 U JP S62104436U JP 19722885 U JP19722885 U JP 19722885U JP 19722885 U JP19722885 U JP 19722885U JP S62104436 U JPS62104436 U JP S62104436U
Authority
JP
Japan
Prior art keywords
side electrode
high frequency
reaction
frequency side
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19722885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530353Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197228U priority Critical patent/JPH0530353Y2/ja
Publication of JPS62104436U publication Critical patent/JPS62104436U/ja
Application granted granted Critical
Publication of JPH0530353Y2 publication Critical patent/JPH0530353Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP1985197228U 1985-12-20 1985-12-20 Expired - Lifetime JPH0530353Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197228U JPH0530353Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197228U JPH0530353Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Publications (2)

Publication Number Publication Date
JPS62104436U true JPS62104436U (enrdf_load_stackoverflow) 1987-07-03
JPH0530353Y2 JPH0530353Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=31156761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197228U Expired - Lifetime JPH0530353Y2 (enrdf_load_stackoverflow) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPH0530353Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143596A (ja) * 1982-02-22 1983-08-26 Toshiba Corp 化合物半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143596A (ja) * 1982-02-22 1983-08-26 Toshiba Corp 化合物半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0530353Y2 (enrdf_load_stackoverflow) 1993-08-03

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