JPS637159U - - Google Patents
Info
- Publication number
- JPS637159U JPS637159U JP10100986U JP10100986U JPS637159U JP S637159 U JPS637159 U JP S637159U JP 10100986 U JP10100986 U JP 10100986U JP 10100986 U JP10100986 U JP 10100986U JP S637159 U JPS637159 U JP S637159U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- gas
- evaporation source
- source crucible
- plating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 239000000470 constituent Substances 0.000 claims 1
- 238000007664 blowing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10100986U JPS637159U (ko) | 1986-07-01 | 1986-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10100986U JPS637159U (ko) | 1986-07-01 | 1986-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS637159U true JPS637159U (ko) | 1988-01-18 |
Family
ID=30971358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10100986U Pending JPS637159U (ko) | 1986-07-01 | 1986-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS637159U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324057A (ja) * | 1986-07-17 | 1988-02-01 | Kawasaki Steel Corp | ドライプレ−テイング装置 |
-
1986
- 1986-07-01 JP JP10100986U patent/JPS637159U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324057A (ja) * | 1986-07-17 | 1988-02-01 | Kawasaki Steel Corp | ドライプレ−テイング装置 |
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