JPS637092B2 - - Google Patents
Info
- Publication number
- JPS637092B2 JPS637092B2 JP10923183A JP10923183A JPS637092B2 JP S637092 B2 JPS637092 B2 JP S637092B2 JP 10923183 A JP10923183 A JP 10923183A JP 10923183 A JP10923183 A JP 10923183A JP S637092 B2 JPS637092 B2 JP S637092B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- particles
- fine particles
- incident
- producing fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 37
- 239000010419 fine particle Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000012770 industrial material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923183A JPS60825A (ja) | 1983-06-20 | 1983-06-20 | 微粒子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923183A JPS60825A (ja) | 1983-06-20 | 1983-06-20 | 微粒子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60825A JPS60825A (ja) | 1985-01-05 |
| JPS637092B2 true JPS637092B2 (enrdf_load_stackoverflow) | 1988-02-15 |
Family
ID=14504934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10923183A Granted JPS60825A (ja) | 1983-06-20 | 1983-06-20 | 微粒子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60825A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224557U (enrdf_load_stackoverflow) * | 1985-07-30 | 1987-02-14 | ||
| US6136412A (en) * | 1997-10-10 | 2000-10-24 | 3M Innovative Properties Company | Microtextured catalyst transfer substrate |
| US5879828A (en) * | 1997-10-10 | 1999-03-09 | Minnesota Mining And Manufacturing Company | Membrane electrode assembly |
| US6042959A (en) * | 1997-10-10 | 2000-03-28 | 3M Innovative Properties Company | Membrane electrode assembly and method of its manufacture |
| US5879827A (en) * | 1997-10-10 | 1999-03-09 | Minnesota Mining And Manufacturing Company | Catalyst for membrane electrode assembly and method of making |
| JP5052074B2 (ja) * | 2006-09-06 | 2012-10-17 | 株式会社アルバック | ナノ金属粒子及びナノオーダの配線の形成方法 |
-
1983
- 1983-06-20 JP JP10923183A patent/JPS60825A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60825A (ja) | 1985-01-05 |
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