JPS636975B2 - - Google Patents
Info
- Publication number
- JPS636975B2 JPS636975B2 JP56123978A JP12397881A JPS636975B2 JP S636975 B2 JPS636975 B2 JP S636975B2 JP 56123978 A JP56123978 A JP 56123978A JP 12397881 A JP12397881 A JP 12397881A JP S636975 B2 JPS636975 B2 JP S636975B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- lens
- unipotential
- lenses
- aberration coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56123978A JPS5825046A (ja) | 1981-08-07 | 1981-08-07 | 静電形電子レンズ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56123978A JPS5825046A (ja) | 1981-08-07 | 1981-08-07 | 静電形電子レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5825046A JPS5825046A (ja) | 1983-02-15 |
| JPS636975B2 true JPS636975B2 (cg-RX-API-DMAC7.html) | 1988-02-15 |
Family
ID=14874011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56123978A Granted JPS5825046A (ja) | 1981-08-07 | 1981-08-07 | 静電形電子レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5825046A (cg-RX-API-DMAC7.html) |
-
1981
- 1981-08-07 JP JP56123978A patent/JPS5825046A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5825046A (ja) | 1983-02-15 |
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