JPS636974B2 - - Google Patents

Info

Publication number
JPS636974B2
JPS636974B2 JP56123977A JP12397781A JPS636974B2 JP S636974 B2 JPS636974 B2 JP S636974B2 JP 56123977 A JP56123977 A JP 56123977A JP 12397781 A JP12397781 A JP 12397781A JP S636974 B2 JPS636974 B2 JP S636974B2
Authority
JP
Japan
Prior art keywords
electrode
lens
lenses
center
slope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56123977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5825045A (ja
Inventor
Kazue Yoshida
Akira Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56123977A priority Critical patent/JPS5825045A/ja
Publication of JPS5825045A publication Critical patent/JPS5825045A/ja
Publication of JPS636974B2 publication Critical patent/JPS636974B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56123977A 1981-08-07 1981-08-07 静電形電子レンズ Granted JPS5825045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56123977A JPS5825045A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56123977A JPS5825045A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Publications (2)

Publication Number Publication Date
JPS5825045A JPS5825045A (ja) 1983-02-15
JPS636974B2 true JPS636974B2 (cg-RX-API-DMAC7.html) 1988-02-15

Family

ID=14873985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56123977A Granted JPS5825045A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Country Status (1)

Country Link
JP (1) JPS5825045A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61183472A (ja) * 1985-02-09 1986-08-16 Shinko Electric Ind Co Ltd リードフレームの部分めっき装置
JPS6331536A (ja) * 1986-07-25 1988-02-10 Natl Res Inst For Metals プラズマ気相反応による微粒子製造装置

Also Published As

Publication number Publication date
JPS5825045A (ja) 1983-02-15

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