JPS5825046A - 静電形電子レンズ - Google Patents

静電形電子レンズ

Info

Publication number
JPS5825046A
JPS5825046A JP56123978A JP12397881A JPS5825046A JP S5825046 A JPS5825046 A JP S5825046A JP 56123978 A JP56123978 A JP 56123978A JP 12397881 A JP12397881 A JP 12397881A JP S5825046 A JPS5825046 A JP S5825046A
Authority
JP
Japan
Prior art keywords
electrode
lens
electrostatic
center
unipotential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56123978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636975B2 (cg-RX-API-DMAC7.html
Inventor
Akira Kikuchi
章 菊池
Kenji Kurihara
健二 栗原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56123978A priority Critical patent/JPS5825046A/ja
Publication of JPS5825046A publication Critical patent/JPS5825046A/ja
Publication of JPS636975B2 publication Critical patent/JPS636975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56123978A 1981-08-07 1981-08-07 静電形電子レンズ Granted JPS5825046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56123978A JPS5825046A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56123978A JPS5825046A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Publications (2)

Publication Number Publication Date
JPS5825046A true JPS5825046A (ja) 1983-02-15
JPS636975B2 JPS636975B2 (cg-RX-API-DMAC7.html) 1988-02-15

Family

ID=14874011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56123978A Granted JPS5825046A (ja) 1981-08-07 1981-08-07 静電形電子レンズ

Country Status (1)

Country Link
JP (1) JPS5825046A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS636975B2 (cg-RX-API-DMAC7.html) 1988-02-15

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