JPS636846A - ＡｌＧａＡｓ系基板のエツチング方法 - Google Patents
ＡｌＧａＡｓ系基板のエツチング方法Info
- Publication number
- JPS636846A JPS636846A JP15041486A JP15041486A JPS636846A JP S636846 A JPS636846 A JP S636846A JP 15041486 A JP15041486 A JP 15041486A JP 15041486 A JP15041486 A JP 15041486A JP S636846 A JPS636846 A JP S636846A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etchant
- algaas
- gaas
- ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 56
- 239000000758 substrate Substances 0.000 title claims description 16
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 20
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims abstract description 14
- 239000000203 mixture Substances 0.000 claims abstract description 12
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 claims abstract description 6
- 235000002906 tartaric acid Nutrition 0.000 claims abstract description 6
- 239000011975 tartaric acid Substances 0.000 claims abstract description 6
- 239000007864 aqueous solution Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 5
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims 1
- 229910001868 water Inorganic materials 0.000 abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 230000003247 decreasing effect Effects 0.000 abstract 5
- 230000007423 decrease Effects 0.000 description 5
- SWXQKHHHCFXQJF-UHFFFAOYSA-N azane;hydrogen peroxide Chemical compound [NH4+].[O-]O SWXQKHHHCFXQJF-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- LRRBNLHPFPHVCW-UHFFFAOYSA-N 2,3-dihydroxybutanedioic acid;hydrogen peroxide Chemical group OO.OC(=O)C(O)C(O)C(O)=O LRRBNLHPFPHVCW-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Landscapes
- Weting (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15041486A JPS636846A (ja) | 1986-06-26 | 1986-06-26 | ＡｌＧａＡｓ系基板のエツチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15041486A JPS636846A (ja) | 1986-06-26 | 1986-06-26 | ＡｌＧａＡｓ系基板のエツチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS636846A true JPS636846A (ja) | 1988-01-12 |
| JPH0545058B2 JPH0545058B2 (enrdf_load_stackoverflow) | 1993-07-08 |
Family
ID=15496419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15041486A Granted JPS636846A (ja) | 1986-06-26 | 1986-06-26 | ＡｌＧａＡｓ系基板のエツチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636846A (enrdf_load_stackoverflow) |
-
1986
- 1986-06-26 JP JP15041486A patent/JPS636846A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0545058B2 (enrdf_load_stackoverflow) | 1993-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |