JPS6367330B2 - - Google Patents
Info
- Publication number
- JPS6367330B2 JPS6367330B2 JP58133296A JP13329683A JPS6367330B2 JP S6367330 B2 JPS6367330 B2 JP S6367330B2 JP 58133296 A JP58133296 A JP 58133296A JP 13329683 A JP13329683 A JP 13329683A JP S6367330 B2 JPS6367330 B2 JP S6367330B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen
- thin film
- silicon
- base material
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58133296A JPS6025225A (ja) | 1983-07-20 | 1983-07-20 | 薄膜半導体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58133296A JPS6025225A (ja) | 1983-07-20 | 1983-07-20 | 薄膜半導体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6025225A JPS6025225A (ja) | 1985-02-08 |
| JPS6367330B2 true JPS6367330B2 (cg-RX-API-DMAC7.html) | 1988-12-26 |
Family
ID=15101334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58133296A Granted JPS6025225A (ja) | 1983-07-20 | 1983-07-20 | 薄膜半導体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025225A (cg-RX-API-DMAC7.html) |
-
1983
- 1983-07-20 JP JP58133296A patent/JPS6025225A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6025225A (ja) | 1985-02-08 |
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