JPS6367330B2 - - Google Patents

Info

Publication number
JPS6367330B2
JPS6367330B2 JP58133296A JP13329683A JPS6367330B2 JP S6367330 B2 JPS6367330 B2 JP S6367330B2 JP 58133296 A JP58133296 A JP 58133296A JP 13329683 A JP13329683 A JP 13329683A JP S6367330 B2 JPS6367330 B2 JP S6367330B2
Authority
JP
Japan
Prior art keywords
hydrogen
thin film
silicon
base material
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58133296A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6025225A (ja
Inventor
Toshio Kamisaka
Kazuaki Myamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP58133296A priority Critical patent/JPS6025225A/ja
Publication of JPS6025225A publication Critical patent/JPS6025225A/ja
Publication of JPS6367330B2 publication Critical patent/JPS6367330B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/3411—

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP58133296A 1983-07-20 1983-07-20 薄膜半導体の製造方法 Granted JPS6025225A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58133296A JPS6025225A (ja) 1983-07-20 1983-07-20 薄膜半導体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58133296A JPS6025225A (ja) 1983-07-20 1983-07-20 薄膜半導体の製造方法

Publications (2)

Publication Number Publication Date
JPS6025225A JPS6025225A (ja) 1985-02-08
JPS6367330B2 true JPS6367330B2 (cg-RX-API-DMAC10.html) 1988-12-26

Family

ID=15101334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58133296A Granted JPS6025225A (ja) 1983-07-20 1983-07-20 薄膜半導体の製造方法

Country Status (1)

Country Link
JP (1) JPS6025225A (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6025225A (ja) 1985-02-08

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