JPS636726U - - Google Patents
Info
- Publication number
- JPS636726U JPS636726U JP10045186U JP10045186U JPS636726U JP S636726 U JPS636726 U JP S636726U JP 10045186 U JP10045186 U JP 10045186U JP 10045186 U JP10045186 U JP 10045186U JP S636726 U JPS636726 U JP S636726U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating body
- semiconductor manufacturing
- manufacturing apparatus
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000008155 medical solution Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10045186U JPS636726U (ko) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10045186U JPS636726U (ko) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636726U true JPS636726U (ko) | 1988-01-18 |
Family
ID=30970287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10045186U Pending JPS636726U (ko) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636726U (ko) |
-
1986
- 1986-06-30 JP JP10045186U patent/JPS636726U/ja active Pending