JPS6351435U - - Google Patents
Info
- Publication number
- JPS6351435U JPS6351435U JP14604286U JP14604286U JPS6351435U JP S6351435 U JPS6351435 U JP S6351435U JP 14604286 U JP14604286 U JP 14604286U JP 14604286 U JP14604286 U JP 14604286U JP S6351435 U JPS6351435 U JP S6351435U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chuck
- spraying
- development processing
- developer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims 2
- 210000000078 claw Anatomy 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14604286U JPS6351435U (ko) | 1986-09-22 | 1986-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14604286U JPS6351435U (ko) | 1986-09-22 | 1986-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6351435U true JPS6351435U (ko) | 1988-04-07 |
Family
ID=31058140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14604286U Pending JPS6351435U (ko) | 1986-09-22 | 1986-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6351435U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014103274A (ja) * | 2012-11-20 | 2014-06-05 | Shindengen Electric Mfg Co Ltd | レジスト現像装置、レジスト現像方法及び半導体装置の製造方法 |
-
1986
- 1986-09-22 JP JP14604286U patent/JPS6351435U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014103274A (ja) * | 2012-11-20 | 2014-06-05 | Shindengen Electric Mfg Co Ltd | レジスト現像装置、レジスト現像方法及び半導体装置の製造方法 |