JPS62126829U - - Google Patents
Info
- Publication number
- JPS62126829U JPS62126829U JP1295186U JP1295186U JPS62126829U JP S62126829 U JPS62126829 U JP S62126829U JP 1295186 U JP1295186 U JP 1295186U JP 1295186 U JP1295186 U JP 1295186U JP S62126829 U JPS62126829 U JP S62126829U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- rotary coating
- holding
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295186U JPS62126829U (ko) | 1986-01-31 | 1986-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1295186U JPS62126829U (ko) | 1986-01-31 | 1986-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126829U true JPS62126829U (ko) | 1987-08-12 |
Family
ID=30801559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1295186U Pending JPS62126829U (ko) | 1986-01-31 | 1986-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126829U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (ja) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |
-
1986
- 1986-01-31 JP JP1295186U patent/JPS62126829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05169003A (ja) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | 塗布装置 |