JPS62126829U - - Google Patents

Info

Publication number
JPS62126829U
JPS62126829U JP1295186U JP1295186U JPS62126829U JP S62126829 U JPS62126829 U JP S62126829U JP 1295186 U JP1295186 U JP 1295186U JP 1295186 U JP1295186 U JP 1295186U JP S62126829 U JPS62126829 U JP S62126829U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
rotary coating
holding
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1295186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1295186U priority Critical patent/JPS62126829U/ja
Publication of JPS62126829U publication Critical patent/JPS62126829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1295186U 1986-01-31 1986-01-31 Pending JPS62126829U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1295186U JPS62126829U (ko) 1986-01-31 1986-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1295186U JPS62126829U (ko) 1986-01-31 1986-01-31

Publications (1)

Publication Number Publication Date
JPS62126829U true JPS62126829U (ko) 1987-08-12

Family

ID=30801559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1295186U Pending JPS62126829U (ko) 1986-01-31 1986-01-31

Country Status (1)

Country Link
JP (1) JPS62126829U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05169003A (ja) * 1991-12-20 1993-07-09 Tokyo Ohka Kogyo Co Ltd 塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05169003A (ja) * 1991-12-20 1993-07-09 Tokyo Ohka Kogyo Co Ltd 塗布装置

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