JPS6311559U - - Google Patents
Info
- Publication number
- JPS6311559U JPS6311559U JP10438986U JP10438986U JPS6311559U JP S6311559 U JPS6311559 U JP S6311559U JP 10438986 U JP10438986 U JP 10438986U JP 10438986 U JP10438986 U JP 10438986U JP S6311559 U JPS6311559 U JP S6311559U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering device
- semiconductor
- vacuum
- vacuum containers
- semiconductor sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000013077 target material Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000002457 bidirectional effect Effects 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10438986U JPS6311559U (ko) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10438986U JPS6311559U (ko) | 1986-07-07 | 1986-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311559U true JPS6311559U (ko) | 1988-01-26 |
Family
ID=30977838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10438986U Pending JPS6311559U (ko) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311559U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010174355A (ja) * | 2009-01-30 | 2010-08-12 | Ulvac Japan Ltd | スパッタリング装置及びその使用方法 |
| JP2013253316A (ja) * | 2012-05-09 | 2013-12-19 | Iza Corp | スパッタリング装置 |
-
1986
- 1986-07-07 JP JP10438986U patent/JPS6311559U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010174355A (ja) * | 2009-01-30 | 2010-08-12 | Ulvac Japan Ltd | スパッタリング装置及びその使用方法 |
| JP2013253316A (ja) * | 2012-05-09 | 2013-12-19 | Iza Corp | スパッタリング装置 |
| US9437404B2 (en) | 2012-05-09 | 2016-09-06 | Seagate Technology Llc | Sputtering apparatus |