JPH01100446U - - Google Patents
Info
- Publication number
- JPH01100446U JPH01100446U JP19519587U JP19519587U JPH01100446U JP H01100446 U JPH01100446 U JP H01100446U JP 19519587 U JP19519587 U JP 19519587U JP 19519587 U JP19519587 U JP 19519587U JP H01100446 U JPH01100446 U JP H01100446U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- prevent
- transfer arm
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19519587U JPH01100446U (ko) | 1987-12-23 | 1987-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19519587U JPH01100446U (ko) | 1987-12-23 | 1987-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100446U true JPH01100446U (ko) | 1989-07-05 |
Family
ID=31485885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19519587U Pending JPH01100446U (ko) | 1987-12-23 | 1987-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100446U (ko) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0452743U (ko) * | 1990-09-10 | 1992-05-06 | ||
| JPH07169818A (ja) * | 1994-09-19 | 1995-07-04 | Sony Corp | ウエハ搬送具 |
| JP2004200678A (ja) * | 2002-12-05 | 2004-07-15 | Tokyo Electron Ltd | 取外し可能な半導体ウェハサセプタ |
| JP2017224657A (ja) * | 2016-06-13 | 2017-12-21 | 東京エレクトロン株式会社 | 基板搬送装置および基板搬送方法 |
-
1987
- 1987-12-23 JP JP19519587U patent/JPH01100446U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0452743U (ko) * | 1990-09-10 | 1992-05-06 | ||
| JPH07169818A (ja) * | 1994-09-19 | 1995-07-04 | Sony Corp | ウエハ搬送具 |
| JP2004200678A (ja) * | 2002-12-05 | 2004-07-15 | Tokyo Electron Ltd | 取外し可能な半導体ウェハサセプタ |
| JP4637475B2 (ja) * | 2002-12-05 | 2011-02-23 | 東京エレクトロン株式会社 | 取外し可能なサセプタを用いた半導体基板搬送システム、及び半導体基板の搬送方法 |
| JP2017224657A (ja) * | 2016-06-13 | 2017-12-21 | 東京エレクトロン株式会社 | 基板搬送装置および基板搬送方法 |