JPS6365237U - - Google Patents

Info

Publication number
JPS6365237U
JPS6365237U JP1986159182U JP15918286U JPS6365237U JP S6365237 U JPS6365237 U JP S6365237U JP 1986159182 U JP1986159182 U JP 1986159182U JP 15918286 U JP15918286 U JP 15918286U JP S6365237 U JPS6365237 U JP S6365237U
Authority
JP
Japan
Prior art keywords
tape
vacuum
wafer
pipe
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986159182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521886Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986159182U priority Critical patent/JPH0521886Y2/ja
Publication of JPS6365237U publication Critical patent/JPS6365237U/ja
Application granted granted Critical
Publication of JPH0521886Y2 publication Critical patent/JPH0521886Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
JP1986159182U 1986-10-17 1986-10-17 Expired - Lifetime JPH0521886Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986159182U JPH0521886Y2 (cg-RX-API-DMAC7.html) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986159182U JPH0521886Y2 (cg-RX-API-DMAC7.html) 1986-10-17 1986-10-17

Publications (2)

Publication Number Publication Date
JPS6365237U true JPS6365237U (cg-RX-API-DMAC7.html) 1988-04-30
JPH0521886Y2 JPH0521886Y2 (cg-RX-API-DMAC7.html) 1993-06-04

Family

ID=31083373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986159182U Expired - Lifetime JPH0521886Y2 (cg-RX-API-DMAC7.html) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPH0521886Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311749A (ja) * 1989-06-09 1991-01-21 Fujitsu Ltd 半導体ウエハに粘着テープを接着する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311749A (ja) * 1989-06-09 1991-01-21 Fujitsu Ltd 半導体ウエハに粘着テープを接着する方法

Also Published As

Publication number Publication date
JPH0521886Y2 (cg-RX-API-DMAC7.html) 1993-06-04

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