JPS636456U - - Google Patents
Info
- Publication number
- JPS636456U JPS636456U JP1986099068U JP9906886U JPS636456U JP S636456 U JPS636456 U JP S636456U JP 1986099068 U JP1986099068 U JP 1986099068U JP 9906886 U JP9906886 U JP 9906886U JP S636456 U JPS636456 U JP S636456U
- Authority
- JP
- Japan
- Prior art keywords
- light
- glass plate
- shielding pattern
- mask
- transparent conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 3
- 239000000839 emulsion Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の一実施例を示す断面図、第２
図は同じく他の一実施例を示す断面図、第３図は
従来の露光用マスクの断面図である。
１…ガラス基板、３，８…遮光パターン、４，
６，７…透明導電膜。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a sectional view showing another embodiment, and FIG. 3 is a sectional view of a conventional exposure mask. 1... Glass substrate, 3, 8... Light shielding pattern, 4,
6, 7...Transparent conductive film.
Claims (1)
遮光パターンの形成された露光用マスクにおいて
、少なくとも前記遮光パターンの形成されたガラ
ス板の主面上に透明導電膜が形成されたことを特
徴とする露光用マスク。 An exposure mask having a light-shielding pattern made of a metal film or an emulsion formed on a glass plate, characterized in that a transparent conductive film is formed on at least the main surface of the glass plate on which the light-shielding pattern is formed. mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099068U JPS636456U (en) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099068U JPS636456U (en) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636456U true JPS636456U (en) | 1988-01-16 |
Family
ID=30967610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986099068U Pending JPS636456U (en) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636456U (en) |
-
1986
- 1986-06-30 JP JP1986099068U patent/JPS636456U/ja active Pending
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