JPS60104840U - photo mask - Google Patents
photo maskInfo
- Publication number
- JPS60104840U JPS60104840U JP1983198368U JP19836883U JPS60104840U JP S60104840 U JPS60104840 U JP S60104840U JP 1983198368 U JP1983198368 U JP 1983198368U JP 19836883 U JP19836883 U JP 19836883U JP S60104840 U JPS60104840 U JP S60104840U
- Authority
- JP
- Japan
- Prior art keywords
- photo mask
- reticle
- thin film
- high transmittance
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来のレチクルを用いた縮小投影露光装置の
光学系の模式的概略構成図、第２図は本考案の一実施例
のレチクルの模式的断面図、第３図は該レチクルを用い
た縮小投影露光装置の光学系の模式的概略構成図である
。
図において、１１はレチクル、１２はガラス基板、１３
はクロム薄膜よりなる所望パターン、１４はレチクル１
１の両面に設けられた所望膜厚の 。
高い透過率を有する膜を示す。FIG. 1 is a schematic diagram of the optical system of a reduction projection exposure apparatus using a conventional reticle, FIG. 2 is a schematic cross-sectional view of a reticle according to an embodiment of the present invention, and FIG. 3 is a diagram illustrating the reticle. FIG. 2 is a schematic diagram of the optical system of the reduction projection exposure apparatus used. In the figure, 11 is a reticle, 12 is a glass substrate, and 13 is a reticle.
14 is a desired pattern made of a chromium thin film, and 14 is a reticle 1.
1 with a desired film thickness on both sides. Indicates a membrane with high transmittance.
Claims (1)
本る膜が設けられていることを特徴とするフォトマスク
。High transmittance of transparent substrate surface with light-shielding pattern formed*
A photomask characterized by being provided with a thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983198368U JPS60104840U (en) | 1983-12-22 | 1983-12-22 | photo mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983198368U JPS60104840U (en) | 1983-12-22 | 1983-12-22 | photo mask |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60104840U true JPS60104840U (en) | 1985-07-17 |
Family
ID=30757299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983198368U Pending JPS60104840U (en) | 1983-12-22 | 1983-12-22 | photo mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60104840U (en) |
-
1983
- 1983-12-22 JP JP1983198368U patent/JPS60104840U/en active Pending
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