JPS6362860B2 - - Google Patents

Info

Publication number
JPS6362860B2
JPS6362860B2 JP55113709A JP11370980A JPS6362860B2 JP S6362860 B2 JPS6362860 B2 JP S6362860B2 JP 55113709 A JP55113709 A JP 55113709A JP 11370980 A JP11370980 A JP 11370980A JP S6362860 B2 JPS6362860 B2 JP S6362860B2
Authority
JP
Japan
Prior art keywords
electrode body
reservoir
ion
electrode
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55113709A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5738540A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11370980A priority Critical patent/JPS5738540A/ja
Publication of JPS5738540A publication Critical patent/JPS5738540A/ja
Publication of JPS6362860B2 publication Critical patent/JPS6362860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP11370980A 1980-08-19 1980-08-19 Field emission type ion source Granted JPS5738540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11370980A JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Publications (2)

Publication Number Publication Date
JPS5738540A JPS5738540A (en) 1982-03-03
JPS6362860B2 true JPS6362860B2 (enExample) 1988-12-05

Family

ID=14619167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11370980A Granted JPS5738540A (en) 1980-08-19 1980-08-19 Field emission type ion source

Country Status (1)

Country Link
JP (1) JPS5738540A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873947A (ja) * 1981-10-26 1983-05-04 Jeol Ltd イオン銃
JPS6241748A (ja) * 1985-08-13 1987-02-23 太平洋セメント株式会社 不燃性無機建材の製造方法
US5047830A (en) * 1990-05-22 1991-09-10 Amp Incorporated Field emitter array integrated circuit chip interconnection

Also Published As

Publication number Publication date
JPS5738540A (en) 1982-03-03

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