JPS6362109A - 透明導電膜製造方法 - Google Patents

透明導電膜製造方法

Info

Publication number
JPS6362109A
JPS6362109A JP61206356A JP20635686A JPS6362109A JP S6362109 A JPS6362109 A JP S6362109A JP 61206356 A JP61206356 A JP 61206356A JP 20635686 A JP20635686 A JP 20635686A JP S6362109 A JPS6362109 A JP S6362109A
Authority
JP
Japan
Prior art keywords
substrate
laser
tin oxide
base material
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61206356A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353727B2 (enrdf_load_stackoverflow
Inventor
田畑　収
三郎 木村
豊永　由布子
涼 木村
昌明 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Panasonic Holdings Corp
Original Assignee
Agency of Industrial Science and Technology
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Matsushita Electric Industrial Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP61206356A priority Critical patent/JPS6362109A/ja
Priority to US07/091,971 priority patent/US4859496A/en
Priority to KR1019870009702A priority patent/KR900007054B1/ko
Publication of JPS6362109A publication Critical patent/JPS6362109A/ja
Publication of JPH0353727B2 publication Critical patent/JPH0353727B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP61206356A 1986-09-02 1986-09-02 透明導電膜製造方法 Granted JPS6362109A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61206356A JPS6362109A (ja) 1986-09-02 1986-09-02 透明導電膜製造方法
US07/091,971 US4859496A (en) 1986-09-02 1987-08-31 Method of producing an electrically-conductive transparent film
KR1019870009702A KR900007054B1 (ko) 1986-09-02 1987-09-02 투명도전막의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61206356A JPS6362109A (ja) 1986-09-02 1986-09-02 透明導電膜製造方法

Publications (2)

Publication Number Publication Date
JPS6362109A true JPS6362109A (ja) 1988-03-18
JPH0353727B2 JPH0353727B2 (enrdf_load_stackoverflow) 1991-08-16

Family

ID=16521959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61206356A Granted JPS6362109A (ja) 1986-09-02 1986-09-02 透明導電膜製造方法

Country Status (1)

Country Link
JP (1) JPS6362109A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241805A (ja) * 1987-03-27 1988-10-07 株式会社ブリヂストン 透明導電性膜の製造方法
JPH0386710U (enrdf_load_stackoverflow) * 1989-12-21 1991-09-03
WO2000065611A1 (en) * 1999-04-22 2000-11-02 Seiko Instruments Inc. Method of forming conducting transparent film, method of repairing wiring connection, and apparatus for forming conducting transparent film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241805A (ja) * 1987-03-27 1988-10-07 株式会社ブリヂストン 透明導電性膜の製造方法
JPH0386710U (enrdf_load_stackoverflow) * 1989-12-21 1991-09-03
WO2000065611A1 (en) * 1999-04-22 2000-11-02 Seiko Instruments Inc. Method of forming conducting transparent film, method of repairing wiring connection, and apparatus for forming conducting transparent film

Also Published As

Publication number Publication date
JPH0353727B2 (enrdf_load_stackoverflow) 1991-08-16

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