JPS6361156B2 - - Google Patents
Info
- Publication number
- JPS6361156B2 JPS6361156B2 JP18001986A JP18001986A JPS6361156B2 JP S6361156 B2 JPS6361156 B2 JP S6361156B2 JP 18001986 A JP18001986 A JP 18001986A JP 18001986 A JP18001986 A JP 18001986A JP S6361156 B2 JPS6361156 B2 JP S6361156B2
- Authority
- JP
- Japan
- Prior art keywords
- dust
- hollow
- outside
- arm
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 23
- 239000000428 dust Substances 0.000 description 20
- 230000003749 cleanliness Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000004744 fabric Substances 0.000 description 5
- 239000011796 hollow space material Substances 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Transmission Devices (AREA)
- Manipulator (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18001986A JPS6257886A (ja) | 1986-08-01 | 1986-08-01 | 自動作業装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18001986A JPS6257886A (ja) | 1986-08-01 | 1986-08-01 | 自動作業装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6257886A JPS6257886A (ja) | 1987-03-13 |
JPS6361156B2 true JPS6361156B2 (sh) | 1988-11-28 |
Family
ID=16076038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18001986A Granted JPS6257886A (ja) | 1986-08-01 | 1986-08-01 | 自動作業装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6257886A (sh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0367389U (sh) * | 1989-11-02 | 1991-07-01 |
-
1986
- 1986-08-01 JP JP18001986A patent/JPS6257886A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0367389U (sh) * | 1989-11-02 | 1991-07-01 |
Also Published As
Publication number | Publication date |
---|---|
JPS6257886A (ja) | 1987-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0310478B2 (sh) | ||
JPS60227437A (ja) | 集積回路用インターフェース装置 | |
NO940178L (no) | Fremgangsmåte for styring av en robot m.h.t. posisjon/kraft | |
JPS6361156B2 (sh) | ||
JPS60143623A (ja) | 集積回路処理装置 | |
Fallahi et al. | A study of the workspace of five-bar closed loop manipulator | |
FI905724A0 (fi) | Foerfarande foer energiaotervinning vid konditioneringsanordningar. | |
JPS6254694A (ja) | 可動部を有する筒状体 | |
JPS6133889A (ja) | 工業用ロボツト | |
AU8179187A (en) | Device for suppressing ear troubles produced by pressure variations of the environmental atmosphere | |
JP2576268B2 (ja) | ロボットの関節機構 | |
CN212704443U (zh) | 一种长时间持续精准作业的智能雕刻机 | |
JPH0437742Y2 (sh) | ||
Byers et al. | Industrial Hygiene Engineering and Control(552). Student Manual, Section 2. Industrial Ventilation | |
JPS61241075A (ja) | 製品製造装置 | |
JPH0411033Y2 (sh) | ||
JPH06105082B2 (ja) | 発塵防止機構 | |
Pariseau | Effects of differential pressure on particulate levels in minienvironments | |
Furuta et al. | Control of master-slave manipulator based on virtual internal model | |
JP2747024B2 (ja) | 清浄室 | |
JP2695932B2 (ja) | クリーンルーム用エレベータ設備 | |
JPS6268294A (ja) | 産業用ロボツト装置 | |
JPS63139682A (ja) | ロボツトの摺動軸 | |
JPH0542684B2 (sh) | ||
Su et al. | On clean room fluid dynamics |