JPS6361156B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an automatic working device having movable parts such as a link mechanism and a slide mechanism.

[Technical background of the invention and its problems]

Conventionally, automatic work equipment has been used in various fields, but it is mainly used in machine factories and assembly factories. There weren't many.

However, in recent years, high integration has improved, and 1M bits and
Development of technology to create 10M bits is being considered. This type of high integration requires a clean room with a cleanliness level of Class 10 or Class 1, and there is a limit to the number of workers that can enter the room.Unmanned transfer robots are required to perform wafer transport and wafer placement work instead. The development of this robot is progressing rapidly.

However, there is a demand for controlling the generation of dust from robots so that they do not generate dust or generate very little dust.

One of the reasons for this is that automatic work equipment pollutes the environment due to dust, and if the air is not kept at a high level of cleanliness, the hollow space disclosed in Japanese Utility Model Application Publication No. 56-29352, as a means to prevent dust from being generated from robots, is one of the reasons for this. There is a means for surrounding the moving part of a moving body with a bellows.

However, even with this method, since the dust generated by this method only moves within the hollow moving body, there is a possibility that the dust will accumulate, increase in number, and be discharged outside.

Furthermore, the work of expanding and contracting the bellows causes aging of the folds, which causes dust generation.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned problems and provides an automatic working device having a movable part that reduces dust generation.

[Summary of the invention]

The present invention provides a mechanism having a movable part, characterized in that at least the movable part is covered with a dustproof cloth.

[Embodiments of the invention]

Next, an embodiment in which the automatic working device of the present invention is applied to an arm-like mechanism will be described based on the drawings. In an arm-like mechanism in which the hollow members 2, 4, and 6 are connected by link mechanisms 3 and 5, and the hollow parts are continuous, the continuous hollow part 7 is connected to the low pressure holding device 1, and by this device This mechanism is characterized in that the hollow part 7 is maintained at a lower pressure than the outside 8, and the outside of the arm-shaped mechanism 10 is covered with a dustproof cloth 9 as shown in FIG.

The same applies to the armpit mechanism having a slide mechanism, so a description thereof will be omitted.

As described above, the dustproof cloth 9 covering the outside of the arm-like mechanism 10 prevents dust generated at the movable parts such as the link mechanism from scattering. Furthermore, since the hollow part 7 is kept at a lower pressure than the outside 8, the gap in the link mechanism,
and create airflow from the outside to the inside through holes drilled at appropriate locations. This air flow can absorb dust into the hollow member and prevent dust from scattering. This effect prevents contamination of the environment with dust even when a device comprising this mechanism is used in an environment with high air cleanliness. Furthermore, since not only the dust generated in the movable parts but also the dust already present in the environment is absorbed into the hollow member, it has the effect of obtaining an environment with higher air cleanliness.

In a dust-free room that maintains a fairly high level of air cleanliness, humans are also a source of dust. The introduction of devices that maintain high air cleanliness not only promotes automation, but also has the effect of reducing the number of people entering dust-free rooms, which are the source of dust, and preventing environmental pollution. .

In this way, it has the characteristic of maintaining a high level of air cleanliness.

〔Effect of the invention〕

As explained above, according to the present invention, by making the inside of the hollow part have a lower pressure than the outside, the dust generated in the movable part is sucked, and the dust that cannot be sucked out is prevented from scattering outside. By covering the body, it has the effect of doubly preventing dust from scattering to the outside.

[Brief explanation of drawings]

FIG. 1 is a sectional view of an arm-shaped mechanism for explaining an embodiment of the mechanism of the present invention, and FIG. 2 is a sectional view showing the mechanism of FIG. 1 covered with a dustproof cloth. DESCRIPTION OF SYMBOLS 1...Low pressure holding device, 2...Hollow material, 3...Link mechanism, 4...Hollow material, 5...Link mechanism, 6
... hollow material, 7 ... continuous hollow part, 8 ... outside, 9 ... dustproof cloth, 10 ... arm-shaped mechanism.

Claims (1)

[Claims] 1. Means for maintaining the pressure inside the hollow of a working mechanism composed of a hollow body having a movable part to be lower than the outside pressure;
An automatic working device comprising: a dustproof cloth-like body provided so as to surround at least the movable part. 2. The automatic working device according to claim 1, wherein the working mechanism is an arm-like mechanism.