JP2576268B2 - Robot joint mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] Regarding a joint mechanism of a robot having at least a joint mechanism, it is possible to efficiently and inexpensively and effectively prevent foreign matter and dust generated in a joint mechanism portion from scattering outside. For the purpose of improvement, the flange attached to the fixed cover that covers the joint mechanism of the robot body near the opening corresponding to the movable surface of the joint mechanism has a facing surface that is close to the movable surface, and is mounted on the fixed cover. Grooves are formed on the surface for grease accumulation along the moving surface movement direction,
In addition, the groove is filled with grease raised so as to come into contact with the movable surface.

[Industrial applications]

The present invention relates to a configuration of a robot joint mechanism, and more particularly, to a joint mechanism of a robot in which foreign matter and dust generated in the joint mechanism are prevented from scattering outside at low cost and effectively, thereby improving productivity.

In the field of semiconductor devices in recent years, the influence on foreign matter and dust (hereinafter simply referred to as “dust”) generated in various processes such as element and wiring and the like with the improvement of the degree of integration has been increasing. Therefore, it is a major problem how to suppress scattering of dust generated from devices, devices, and the like used in each manufacturing process to the surroundings.

On the other hand, many robots are used as automation equipment in the manufacturing process, and these robots have many joint mechanisms, and particularly these joint mechanisms involve mechanical friction such as motors, reduction gears, and bearings. Due to the presence of the contact portion, dust is generated to some extent, and scatters around the robot from a gap between the rotating shaft and the cover of the fixed portion or another opening.

Therefore, various means have been conceived to suppress the scattering of these dusts, but each of them has a drawback, and a solution is desired.

[Conventional technology]

FIG. 2 is a diagram showing an example of a method of suppressing the scattering of dust in the robot joint mechanism, and FIGS. 3, 4, and 5 are diagrams each showing a method of suppressing the scattering of dust.

Robot 2 on base 1 in FIG. 2 showing a part of the robot
Is attached to a first joint mechanism 6 composed of, for example, a motor 4 and a speed reducer 5 mounted on a frame 3 fixed to the base 1 such that the rotation axis is vertical, as shown by an arrow a. A first shaft 7 that rotates, and a second shaft 7 that is mounted on the first shaft 7 in the same configuration as described above such that the rotation axis is the horizontal direction, for example.
A first arm 9 attached to the joint mechanism 8 and rotating as shown by an arrow b, and a plurality of joint mechanisms (not shown) having the same configuration attached to the other end of the first arm 9; It is composed of a wrist or the like mounted on the distal joint mechanism.

And in a normal robot, each of the above-mentioned joint mechanism parts 6, 8,
Are rotated by a predetermined angle at a predetermined speed in a predetermined direction by a motor and a speed reducer, which are attached to each joint mechanism.

The motors and reduction gears of the joint mechanisms 6, 8,...
A signal line running in a space area connected inside the robot 2 is connected, and the other end of the signal line is connected to a control unit (not shown) located outside the robot 2.

Therefore, by sending a predetermined signal from the control unit, a predetermined work is performed by a tool or a jig attached to a wrist mounted on a distal joint mechanism unit (not shown).

Further, reference numeral 10 in the drawing denotes an exhaust pipe having one end attached to the base 1 and the other end connected to the pump 11.
By operating, the space area connected inside the robot 2 (in other words, the area along the signal line) is reduced in pressure.

On the other hand, a cover 12 fixed to the frame 3 and covering the first joint mechanism 6 is mounted around the first shaft 7 described above, and the first shaft 7 is provided near the first arm 9. A cover 13 that is fixed and surrounds the second joint mechanism 8 is mounted, but each joint mechanism (not shown) is also surrounded by a similar cover.

In particular, each cover in this case, for example, 12 and 13,
A gap with a movable part (such as a rotating shaft) such as a part B is required, but the gap is made as small as possible to enhance the dustproof effect.

Therefore, when the robot 2 is operated while the pump 11 is operated, most of the dust generated from the above-described joint mechanisms 6, 8,... And the peripheral area thereof becomes, for example, the robot as indicated by dotted arrows. Since it moves in the space area along the signal line inside 2 and is absorbed by the pump 11, scattering of dust to the outside can be almost completely eliminated.

However, in order to decompress the inside of the robot 2 so that all generated dust can be sucked by the pump 11, the clearance between the rotation shaft of each joint mechanism and the cover (A and B described above) and the space between each joint mechanism and The flow resistance of the exhaust path, the exhaust capacity of the pump 11, and the like must be taken into consideration as conditions, and there is a disadvantage that much man-hours must be spent on the design and adjustment thereof.

FIG. 3 shows the means for suppressing the scattering of dust to the outside without using a lot of man-hours while using the cover described in FIG. 2. FIG. 3 shows an example of the area A in FIG. It is shown in an enlarged manner.

In FIG. 3, reference numeral 7 denotes a first axis of rotation, and reference numeral 12 denotes a cover fixed to the frame 3 in FIG.

Around the first shaft 7, an elastic seal 15 made of rubber or the like is fixed at a position near the opening-side gap on the inner surface of the cover 12 and along the gap.

In particular, in this case, the gap between the covers 12 (part A in FIG. 2)
The inside of the robot is hermetically sealed by the elastic seal 15, so that the scattering of dust generated inside the robot to the outside can be easily and completely suppressed.

However, since the elastic seal 15 itself is in contact with the cover 12, new dust is generated from the contact portion, and the elastic seal 15 is worn and deformed due to long-term use, and the dustproof effect is reduced. .

In FIG. 4, the robot 22 on the base 21 has a first joint mechanism 23a which rotates as shown by e around the vertical axis of the base 21.
A first arm 24 integrated with a second joint mechanism 24a that rotates as indicated by f, and a third joint mechanism 25a that is provided at the tip of the first arm 24 and rotates in the direction g. A second arm 25 integrated with the first arm 25, a fourth joint mechanism 26 pivotally provided at the tip of the second arm 25, and a fourth joint mechanism
A fifth joint mechanism 27a that rotates the wrist 27 provided at the tip of the wrist 27 in the h direction, and a sixth joint mechanism 28 that rotates about the tip of the wrist 27, Joint mechanism 28
A tool or jig is attached to the tip of the.

The robot 22 can rotate an arm integrated with each of the joint mechanisms at a predetermined speed in a predetermined direction at a predetermined angle in the same manner as in FIG. .

29 shows a rudder made of, for example, coated nylon woven cloth which completely covers the robot 22, and an exhaust pipe 30 provided in a part of the rudder 29 is connected to an exhaust pump (not shown). I have.

In this case, a sufficient degree of redundancy can be given to the size of the rudder 29, so that the operation of the robot 22 can be completely followed, and by operating an exhaust pump (not shown), each joint mechanism and its joints can be operated. Dust generated from the surroundings can be reliably sucked into the pump without scattering to the surrounding space.

However, there is a drawback that the rudder part becomes large to cover the entire robot 22 and the operation area as the robot 22 is restricted, and the rudder part 29 itself is generated due to abrasion or deterioration of the bent part due to long-term use. There is a drawback as a dust source.

FIG. 5 shows each joint mechanism 23 of the robot 22 in FIG.
a, to 28 are individually covered by individual rudder 29a, 29e, respectively. In this case, the first joint mechanism 23
The exhaust pipe 30 described with reference to FIG. 4 is provided at a portion of the rudder 29a covering a.

In the case of using such rudder parts 29a, 29e, etc., there is an advantage that the same effect as in FIG. 4 can be obtained and the whole size can be made smaller than that in FIG. The portion has a drawback that it cannot be used, and each rudder becomes a source of dust due to long-term use as in the case of FIG.

[Problems to be solved by the invention]

In the conventional method of suppressing external scattering of dust in the robot joint mechanism, when the cover is attached to each joint mechanism, the elastic seal itself provided to suppress the external scattering of dust becomes a dust generating body. In addition, when using the rudder, there is a problem that the operation of the robot and the application position of the rudder may be restricted, or the rudder itself may become a dust generating body after long-term use. There was a problem that the effect was reduced.

[Means for solving the problem]

The above problem is that the fixed cover that covers the joint mechanism of the robot body has a flange mounted with an opposing surface close to the movable surface near an opening corresponding to the joint mechanism movable surface,
The problem is solved by a joint mechanism of a robot in which a groove for accumulating grease is formed in the facing surface along the moving direction of the movable surface, and the groove is filled with grease that is raised so as to contact the movable surface.

(Operation)

When the gap between the movable cover and the fixed cover of the robot is filled with grease, the inside of the cover and the inside and outside of the robot are completely shut off by the grease.

In the present invention, a flange having a groove along the opening is attached near the opening facing the movable portion of the fixed cover, and further, the groove of the flange is filled with grease, so that the gap between the cover and the movable portion is formed. Is filled with grease.

Therefore, since the inside and outside of the cover and thus the inside and outside of the robot are shut off, dust generated in each joint mechanism of the robot and its surroundings can be completely prevented from scattering to the outside without depressurizing the inside of the robot or using the rudder. Thus, productivity can be improved.

〔Example〕

FIG. 1 is a view showing a configuration example of a robot joint mechanism according to the present invention, wherein (A) is an overall view, (A-1) and (A-2).
Is an enlarged view of a main part.

The figure shows, as an example, the first and second robots 2 in FIG.
The second joint mechanisms 6 and 8 are replaced with the joint mechanisms 31 and 41 according to the present invention, and the other configurations are completely the same as those in FIG. The same numbers are assigned.

In FIG. 1 (A) showing a part of the robot similarly to FIG. 2,
The robot 2 on the base 1 includes a first shaft 7 attached to a first joint mechanism 31 including a motor 4 and a speed reducer 5 mounted on a frame 3 fixed to the base 1. , The first
Second joint mechanism attached to the shaft 7 of the same configuration as described above.
A first arm 9 attached to 41, a plurality of similar joint mechanisms (not shown) attached to the other end of the first arm 9 and a wrist etc. attached to a terminal joint mechanism not shown. It is composed of

The base 1 does not require the exhaust pipe 11 described with reference to FIG.

On the other hand, a fixed cover 32 fixed to the frame 3 and covering the first joint mechanism 31 is mounted around the first shaft 7 described above, and the first shaft 7 is mounted near the first arm 9. And a fixed cover 42 surrounding the second joint mechanism 41 is attached.

Here, the fixed covers 32 and 42 will be described below.

The fixed cover 32 shown in (A-1) has one end (not shown) located on the lower side of the drawing as described in FIG.
And a cover body 33 whose other end side is formed close to the periphery of the first shaft 7, and the shaft 7 is surrounded by an opening of the cover body 33 close to the periphery of the first shaft 7. And a ring-shaped flange 34 mounted parallel to the peripheral wall surface. In particular, a groove 34a is formed on the inner surface of the flange 34 facing the shaft 7 along the peripheral wall surface of the shaft 7. The groove 34a is filled with low vapor pressure oil grease 35 (for example, trade name "Demnum L200" manufactured by Daikin Industries, Ltd.).

As shown in FIG. 2, the fixed cover 42 shown at (A-2) has one end fixed to the first shaft 7 and the other end formed close to the movable surface of the first arm 9. Cover body
43, and an arc-shaped flange 44 that is long in the thickness direction of the drawing and attached to an opening of the cover main body 43 close to the first arm 9 so as to be parallel to the wall surface of the arm 9;
In particular, a groove 44a is formed on the surface of the flange 44 facing the first arm 9 along the wall surface of the arm 9.
Further, the above-mentioned grease 35 of low vapor pressure oil is provided in the groove 44a.
Is filled.

When the fixed covers 32 and 42 having such a configuration are mounted on the robot 2 instead of the covers 12 and 13 described in FIG.
When the robot 2 is operated, each of the fixed covers 32, 4
The grease 35 filled in each of the flanges 34 and 44 of No. 2 is automatically applied between each of the movable surfaces and fills a gap between the portions.

In this case, the grease 35 is a low vapor pressure oil grease as described above.

Therefore, dust generated from each joint mechanism of the robot described with reference to FIG. 2 is not scattered from the gaps between the fixed covers 32 and 42 and the movable surfaces corresponding to the fixed covers 32 and 42. As a result, it is possible to obtain a required robot joint mechanism that can effectively and inexpensively suppress scattering of foreign matter and dust generated in the joint mechanism portion to the outside.

〔The invention's effect〕

As described above, according to the present invention, it is possible to provide a robot joint mechanism in which foreign matter and dust generated in and around the joint mechanism part are effectively and inexpensively suppressed from scattering to improve the productivity. .

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration example of a robot joint mechanism according to the present invention, FIG. 2 is a diagram showing an example of a conventional method of suppressing scattering of dust in a robot joint mechanism, FIGS. 3, 4, and 5 The figure is a diagram showing another conventional method of suppressing scattering of dust. In the figure, 1 is a base, 2 is a robot, 3 is a frame, 4 is a motor, 5 is a speed reducer, 7 is a first shaft, 9 is a first arm, 31 is a first joint mechanism, 32, 42 is a fixed cover, 33 and 43 are cover bodies, 34 and 44 are flanges, 34a and 44a are grooves, 35 is grease, and 41 is a second joint mechanism.

 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-62-79994 (JP, A) JP-A-63-22290 (JP, A)

Claims (1)

(57) [Claims] A fixed cover for covering a joint mechanism of a robot body has a flange mounted near an opening corresponding to a movable surface of the joint mechanism in the vicinity of the movable surface. A joint mechanism for a robot, wherein a groove for grease accumulation is formed along the moving direction of the movable surface, and the groove is filled with grease that is raised so as to come into contact with the movable surface.