JPS6360471U - - Google Patents
Info
- Publication number
- JPS6360471U JPS6360471U JP15424286U JP15424286U JPS6360471U JP S6360471 U JPS6360471 U JP S6360471U JP 15424286 U JP15424286 U JP 15424286U JP 15424286 U JP15424286 U JP 15424286U JP S6360471 U JPS6360471 U JP S6360471U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- shutter
- thin film
- net
- vacuum thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 230000002265 prevention Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15424286U JPS6360471U (enExample) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15424286U JPS6360471U (enExample) | 1986-10-07 | 1986-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360471U true JPS6360471U (enExample) | 1988-04-22 |
Family
ID=31073863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15424286U Pending JPS6360471U (enExample) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360471U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130661A (ja) * | 1984-07-19 | 1986-02-12 | Matsushita Electric Ind Co Ltd | 被膜形成装置 |
-
1986
- 1986-10-07 JP JP15424286U patent/JPS6360471U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130661A (ja) * | 1984-07-19 | 1986-02-12 | Matsushita Electric Ind Co Ltd | 被膜形成装置 |
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