JPS62129059U - - Google Patents
Info
- Publication number
- JPS62129059U JPS62129059U JP1558086U JP1558086U JPS62129059U JP S62129059 U JPS62129059 U JP S62129059U JP 1558086 U JP1558086 U JP 1558086U JP 1558086 U JP1558086 U JP 1558086U JP S62129059 U JPS62129059 U JP S62129059U
- Authority
- JP
- Japan
- Prior art keywords
- evaporated
- bell gear
- thin film
- evaporation source
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000012806 monitoring device Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558086U JPS62129059U (enExample) | 1986-02-05 | 1986-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1558086U JPS62129059U (enExample) | 1986-02-05 | 1986-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62129059U true JPS62129059U (enExample) | 1987-08-15 |
Family
ID=30806641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1558086U Pending JPS62129059U (enExample) | 1986-02-05 | 1986-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62129059U (enExample) |
-
1986
- 1986-02-05 JP JP1558086U patent/JPS62129059U/ja active Pending
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