JPS6334165U - - Google Patents

Info

Publication number
JPS6334165U
JPS6334165U JP12596086U JP12596086U JPS6334165U JP S6334165 U JPS6334165 U JP S6334165U JP 12596086 U JP12596086 U JP 12596086U JP 12596086 U JP12596086 U JP 12596086U JP S6334165 U JPS6334165 U JP S6334165U
Authority
JP
Japan
Prior art keywords
evaporation source
view port
reflecting mirror
viewport
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12596086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12596086U priority Critical patent/JPS6334165U/ja
Publication of JPS6334165U publication Critical patent/JPS6334165U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12596086U 1986-08-18 1986-08-18 Pending JPS6334165U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12596086U JPS6334165U (enExample) 1986-08-18 1986-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12596086U JPS6334165U (enExample) 1986-08-18 1986-08-18

Publications (1)

Publication Number Publication Date
JPS6334165U true JPS6334165U (enExample) 1988-03-04

Family

ID=31019316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12596086U Pending JPS6334165U (enExample) 1986-08-18 1986-08-18

Country Status (1)

Country Link
JP (1) JPS6334165U (enExample)

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