JPS62126359U - - Google Patents
Info
- Publication number
- JPS62126359U JPS62126359U JP1412686U JP1412686U JPS62126359U JP S62126359 U JPS62126359 U JP S62126359U JP 1412686 U JP1412686 U JP 1412686U JP 1412686 U JP1412686 U JP 1412686U JP S62126359 U JPS62126359 U JP S62126359U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- forming apparatus
- porous member
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1412686U JPS62126359U (enExample) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1412686U JPS62126359U (enExample) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126359U true JPS62126359U (enExample) | 1987-08-11 |
Family
ID=30803824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1412686U Pending JPS62126359U (enExample) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126359U (enExample) |
-
1986
- 1986-02-03 JP JP1412686U patent/JPS62126359U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62126359U (enExample) | ||
| JPS6143275U (ja) | 結晶成長装置 | |
| Roy | Quantitative analysis of thin film morphology evolution | |
| JPS6270430U (enExample) | ||
| JPH01125360U (enExample) | ||
| JPH01168551U (enExample) | ||
| JPS61176257U (enExample) | ||
| JPH036459U (enExample) | ||
| JPH03112931U (enExample) | ||
| JPS6297166U (enExample) | ||
| JPH03116929U (enExample) | ||
| JPH0453436U (enExample) | ||
| JPS6334165U (enExample) | ||
| JPS6364769U (enExample) | ||
| JPS6266771U (enExample) | ||
| JPH0244097U (enExample) | ||
| JPH024234U (enExample) | ||
| JPS6430354U (enExample) | ||
| JPH01129275U (enExample) | ||
| JPS59134044U (ja) | 真空蒸着装置 | |
| JPH0246856U (enExample) | ||
| JPH0178023U (enExample) | ||
| JPH02140841U (enExample) | ||
| JPH0375175U (enExample) | ||
| JPS59169370U (ja) | 液相エピタキシヤル膜成長用基板ホルダ |