JPS6360379B2 - - Google Patents

Info

Publication number
JPS6360379B2
JPS6360379B2 JP22668686A JP22668686A JPS6360379B2 JP S6360379 B2 JPS6360379 B2 JP S6360379B2 JP 22668686 A JP22668686 A JP 22668686A JP 22668686 A JP22668686 A JP 22668686A JP S6360379 B2 JPS6360379 B2 JP S6360379B2
Authority
JP
Japan
Prior art keywords
masks
suction
image
film
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22668686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6381357A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61226686A priority Critical patent/JPS6381357A/ja
Publication of JPS6381357A publication Critical patent/JPS6381357A/ja
Publication of JPS6360379B2 publication Critical patent/JPS6360379B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP61226686A 1986-09-25 1986-09-25 画像マスクの上下２枚同時搬送方法 Granted JPS6381357A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61226686A JPS6381357A (ja) 1986-09-25 1986-09-25 画像マスクの上下２枚同時搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61226686A JPS6381357A (ja) 1986-09-25 1986-09-25 画像マスクの上下２枚同時搬送方法

Publications (2)

Publication Number Publication Date
JPS6381357A JPS6381357A (ja) 1988-04-12
JPS6360379B2 true JPS6360379B2 (enrdf_load_stackoverflow) 1988-11-24

Family

ID=16849063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61226686A Granted JPS6381357A (ja) 1986-09-25 1986-09-25 画像マスクの上下２枚同時搬送方法

Country Status (1)

Country Link
JP (1) JPS6381357A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6381357A (ja) 1988-04-12

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